发明申请
- 专利标题： Catadioptric projection objective
- 专利标题（中）： 反射折射投影物镜
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申请号： US10114919申请日： 2002-04-03
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公开(公告)号： US20020167734A1公开(公告)日： 2002-11-14
- 发明人: Karl-Heinz Schuster
- 申请人： Carl Zeiss Semiconductor Manfacturing Technologies AG
- 申请人地址： null
- 专利权人： Carl Zeiss Semiconductor Manfacturing Technologies AG
- 当前专利权人： Carl Zeiss Semiconductor Manfacturing Technologies AG
- 当前专利权人地址： null
- 优先权： DE10117481.0 20010407
- 主分类号： G02B027/14
- IPC分类号： G02B027/14 ; G02B027/12
摘要：
There is provided a catadioptric projection objective that includes (a) an object plane having a rectangular object field, and (b) a beam splitter situated in a light path after the object plane, having a rectangular surface adapted to the object field and having an aspect ratio not equal to 1.
公开/授权文献
- US07099087B2 Catadioptric projection objective 公开/授权日：2006-08-29
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