Invention Application
- Patent Title: Suspended high reflectivity coating on release structure and fabrication process therefor
- Patent Title (中): 悬浮高反射率涂层在释放结构及其制造工艺上
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Application No.: US09851510Application Date: 2001-05-08
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Publication No.: US20020168136A1Publication Date: 2002-11-14
- Inventor: Walid A. Atia , Minh Van Le
- Applicant: AXSUN Technologies, Inc.
- Applicant Address: null
- Assignee: AXSUN Technologies, Inc.
- Current Assignee: AXSUN Technologies, Inc.
- Current Assignee Address: null
- Main IPC: G02B006/35
- IPC: G02B006/35 ; G02B007/182
Abstract:
In a MOEMS device and corresponding fabrication process, absorbing material along the optical axis of the device is removed. The result is a suspended optical coating, such as a dielectric thin film mirror stack. Such optical coatings can have very low absorption. Thus, the invention can materially lower the net absorption in the device, and thereby improve performance, by degrading power related dependencies.
Public/Granted literature
- US06808276B2 Suspended high reflectivity coating on release structure and fabrication process therefor Public/Granted day:2004-10-26
Information query
