- 专利标题: Modified polycyclic polymers
-
申请号: US10224994申请日: 2002-08-21
-
公开(公告)号: US20030018153A1公开(公告)日: 2003-01-23
- 发明人: Saikumar Jayaraman , George Martin Benedikt , Larry Funderburk Rhodes , Richard Vicari , Robert David Allen , Richard Anthony DiPetro , Ratnam Sooriyakumaran , Thomas Wallow
- 申请人: The B.F.Goodrich Company
- 申请人地址: null
- 专利权人: The B.F.Goodrich Company
- 当前专利权人: The B.F.Goodrich Company
- 当前专利权人地址: null
- 主分类号: C08F010/00
- IPC分类号: C08F010/00
摘要:
The present invention relates to cyclic polymers and their use in photolithographic applications. The cyclic polymers contain a pendant acid labile functional group and a functional group containing a protected hydroxyl moiety. The polymers are post modified by deprotecting the pendant hydroxyl moiety and reacting the deprotected hydroxyl containing moiety with a coreactant. The post-functionalized polymers find application in chemically amplified photoresist compositions.
公开/授权文献
- US06794459B2 Modified polycyclic polymers 公开/授权日:2004-09-21
信息查询