发明申请
US20030077540A1 Positive photosensitive composition 失效
正光敏组合物

Positive photosensitive composition
摘要:
A positive photosensitive composition comprising (A) a specific acid generator that generates an acid upon irradiation of an actinic ray or radiation, and (B) a resin that has a monocyclic or polycyclic alicyclic hydrocarbon structure and is decomposed by the action of an acid to increase solubility in an alkali developing solution.
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