Invention Application
- Patent Title: Method and apparatus for scanning transmission electron microscopy
- Patent Title (中): 扫描透射电子显微镜的方法和装置
-
Application No.: US10346138Application Date: 2003-01-17
-
Publication No.: US20030127595A1Publication Date: 2003-07-10
- Inventor: Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
- Applicant: Hitachi, Ltd.
- Applicant Address: null
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: null
- Priority: JP10-093934 19980302
- Main IPC: H01J037/28
- IPC: H01J037/28 ; G01N023/00 ; G21K007/00

Abstract:
A scanning transmission electron microscope (STEM) offering substantially the same ease of operation as that of a scanning electron microscope (SEM) and providing substantially the same degree of resolution as that of a transmission electron microscope (TEM). The STEM of the invention is constituted based on the constitution of the SEM. The STEM comprises: an electron source for generating a primary electron beam; an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination; an electron deflecting system for scanning the specimen with the primary electron beam emitted thereto; a scattered electron detector for detecting scattered electrons transmitted through the specimen; a projection lens system for projecting the scattered electrons onto a detection surface of the scattered electron detector; an image displaying device for displaying a scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector; and a detection angle changing device for variably establishing a range of scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances a contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.
Public/Granted literature
- US06822233B2 Method and apparatus for scanning transmission electron microscopy Public/Granted day:2004-11-23
Information query