Invention Application
US20030151344A1 Cathode plate of a carbon nano tube field emission display and its fabrication method 失效
碳纳米管场发射显示器的阴极板及其制造方法

Cathode plate of a carbon nano tube field emission display and its fabrication method
Abstract:
A method for fabricating the cathode plate of a carbon nano tube field emission display uses a photoconductive paste and etchable dielectric material to fabricate the cathode plate. The method combines photolithography process and etching process to fabricate a cathode electrode layer, a dielectric layer, a gate layer, and a carbon nano tube emission layer. Packing this cathode plate structure with a conventional anode plate together can form a carbon nano tube field emission array. The distribution of the electric field is uniform and the alignment at post-process is made easy.
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