发明申请
- 专利标题: Method of manufacturing a semiconductor device
- 专利标题(中): 制造半导体器件的方法
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申请号: US10342238申请日: 2003-01-15
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公开(公告)号: US20030153127A1公开(公告)日: 2003-08-14
- 发明人: Takashi Wada , Kazunari Suzuki , Chuichi Miyazaki , Toshihiro Shiotsuki , Tomoko Higashino
- 申请人: Hitachi, Ltd. Hitachi ULSI Systems Co., Ltd.
- 申请人地址: null
- 专利权人: Hitachi, Ltd. Hitachi ULSI Systems Co., Ltd.
- 当前专利权人: Hitachi, Ltd. Hitachi ULSI Systems Co., Ltd.
- 当前专利权人地址: null
- 优先权: JP2002-031722 20020208
- 主分类号: H01L021/44
- IPC分类号: H01L021/44
摘要:
Techniques are provided for preventing occurrence of damage to the top surface of a semiconductor chip at the time of die bonding the semiconductor chip by use of a contact collet. A protection tape is pasted to the top surface of the semiconductor chip before die bonding of the semiconductor chip is executed by pressing the back surface (underside) of the semiconductor chip sucked and securely held by the contact collect against respective chip-mounting regions of a multi-wiring board. The contact collect is, for example, substantially cylindrical in outside shape, and a bottom part (suction head) thereof is made of a soft synthetic rubber, and so forth. The protection tape pasted to pasted to the top surface of the semiconductor chip can prevent the top surface of the semiconductor chip from coming in direct contact with the contact collet even at the time of vacuum suction by pressing the suction head of the contact collect against the top surface of the semiconductor chip.
公开/授权文献
- US06916686B2 Method of manufacturing a semiconductor device 公开/授权日:2005-07-12
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