Invention Application
US20030193025A1 Electron microscope, method for operating the same, and computer-readable medium 失效
电子显微镜,其操作方法和计算机可读介质

  • Patent Title: Electron microscope, method for operating the same, and computer-readable medium
  • Patent Title (中): 电子显微镜,其操作方法和计算机可读介质
  • Application No.: US10410131
    Application Date: 2003-04-10
  • Publication No.: US20030193025A1
    Publication Date: 2003-10-16
  • Inventor: Shigenori Takagi
  • Applicant: Keyence Corporation
  • Applicant Address: null
  • Assignee: Keyence Corporation
  • Current Assignee: Keyence Corporation
  • Current Assignee Address: null
  • Priority: JPP.2002-108932 20020411
  • Main IPC: H01J037/28
  • IPC: H01J037/28
Electron microscope, method for operating the same, and computer-readable medium
Abstract:
In an operation of an electron microscope, at least a spot size of an electron beam on a specimen, an acceleration voltage, a detector type, a specimen position, and an observation magnification are set as a predetermined image observation condition and an observation image is picked up under the predetermined image observation condition. Different image observation conditions are automatically set based on the observation image. A plurality of observation images are picked up based on the setup image observation conditions. The plurality of picked-up observation images are simultaneously displayed on a second display section. A desired observation image is selected from among the observation images displayed on the second display section. The selected observation image is displayed on a first display section on an enlarged scale.
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