Invention Application
- Patent Title: Electron microscope, method for operating the same, and computer-readable medium
- Patent Title (中): 电子显微镜,其操作方法和计算机可读介质
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Application No.: US10410131Application Date: 2003-04-10
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Publication No.: US20030193025A1Publication Date: 2003-10-16
- Inventor: Shigenori Takagi
- Applicant: Keyence Corporation
- Applicant Address: null
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: null
- Priority: JPP.2002-108932 20020411
- Main IPC: H01J037/28
- IPC: H01J037/28

Abstract:
In an operation of an electron microscope, at least a spot size of an electron beam on a specimen, an acceleration voltage, a detector type, a specimen position, and an observation magnification are set as a predetermined image observation condition and an observation image is picked up under the predetermined image observation condition. Different image observation conditions are automatically set based on the observation image. A plurality of observation images are picked up based on the setup image observation conditions. The plurality of picked-up observation images are simultaneously displayed on a second display section. A desired observation image is selected from among the observation images displayed on the second display section. The selected observation image is displayed on a first display section on an enlarged scale.
Public/Granted literature
- US06774364B2 Electron microscope, method for operating the same, and computer-readable medium Public/Granted day:2004-08-10
Information query