公开(公告)号：US20030193026A1

公开(公告)日：2003-10-16

申请号：US10410133

申请日：2003-04-10

Applicant: Keyence Corporation

Inventor： Shigenori Takagi

IPC: G21K007/00 ,  G01N023/00

CPC classification number: H01J37/222 ,  G01N23/2251

Abstract: In an electron microscope, at least the characteristics of the specimen is set on a first image observation mode screen as an image observation condition. An observation image of the specimen is displayed on a first display section based on a condition set on the first image observation mode screen. Observation images of the specimen are displayed on a second display section as one or more secondary electron images or one or more reflection electron images under at least two types of image observation conditions based on the condition set on the first image observation mode screen. Any desired observation image is selected from among the observation images displayed on the second display section.

Abstract translation: 在电子显微镜中，至少将样本的特性设定在作为图像观察条件的第一图像观察模式画面上。 基于在第一图像观察模式屏幕上设置的条件，将样本的观察图像显示在第一显示部分上。 基于在第一图像观察模式屏幕上设置的条件，将样本的观察图像作为一个或多个二次电子图像或至少两种图像观察条件下的一个或多个反射电子图像显示在第二显示部分上。 从显示在第二显示部分上的观察图像中选择任何所需的观察图像。

公开(公告)号：US20030193025A1

公开(公告)日：2003-10-16

申请号：US10410131

申请日：2003-04-10

Applicant: Keyence Corporation

Inventor： Shigenori Takagi

IPC: H01J037/28

CPC classification number: H01J37/28 ,  H01J2237/22

Abstract: In an operation of an electron microscope, at least a spot size of an electron beam on a specimen, an acceleration voltage, a detector type, a specimen position, and an observation magnification are set as a predetermined image observation condition and an observation image is picked up under the predetermined image observation condition. Different image observation conditions are automatically set based on the observation image. A plurality of observation images are picked up based on the setup image observation conditions. The plurality of picked-up observation images are simultaneously displayed on a second display section. A desired observation image is selected from among the observation images displayed on the second display section. The selected observation image is displayed on a first display section on an enlarged scale.

Abstract translation: 在电子显微镜的操作中，将样本上的电子束的至少点尺寸，加速电压，检测器类型，样本位置和观察倍率设置为预定图像观察条件，并且观察图像为 在预定图像观察条件下拾起。 基于观察图像自动设定不同的图像观察条件。 基于设置图像观察条件来拾取多个观察图像。 多个拾取观察图像同时显示在第二显示部分上。 从显示在第二显示部分上的观察图像中选择期望的观察图像。 所选择的观察图像以放大比例显示在第一显示部分上。

公开(公告)号：US20030193024A1

公开(公告)日：2003-10-16

申请号：US10395263

申请日：2003-03-25

Applicant: Keyence Corporation

Inventor： Shigenori Takagi

IPC: H01J037/28 ,  G01N023/225

CPC classification number: H01J37/28 ,  H01J37/026

Abstract: Eliminating electricity of the specimen is performed by applying an acceleration voltage to an electron gun and applying primary electrons to a charged-up specimen from the electron gun. The maximum value of the acceleration voltages of the primary electrons applied in the past is adopted as electricity elimination start acceleration voltage. The acceleration voltage is gradually dropped from the electricity elimination start voltage so as to emit electrons charged on the specimen. The acceleration voltage is applied continuously until the specimen charged negatively becomes uncharged or is charged positively. A plurality of specimens are previously compared with respect to the acceleration voltage at which the secondary electron emission efficiency becomes 1 and electricity elimination termination voltage at which dropping the acceleration voltage is terminated is set to the minimum acceleration voltage or less.

Abstract translation: 通过向电子枪施加加速电压并将电子从电子枪向带电的样品施加一次电子来进行取样。 采用过去施加的一次电子的加速电压的最大值作为消电开始加速电压。 加速电压从消电开始电压逐渐下降，以发射充电在试样上的电子。 连续施加加速电压，直到带负电的样品变得不充电或带正电。 预先将多个试样与二次电子发射效率变为1的加速电压进行比较，将加速电压下降的消电终止电压设定为最小加速电压以下。