Invention Application
- Patent Title: Method of operating and process for fabricating an electron source
- Patent Title (中): 用于制造电子源的操作和处理方法
-
Application No.: US10763552Application Date: 2004-01-23
-
Publication No.: US20040150322A1Publication Date: 2004-08-05
- Inventor: Heinz H. Busta
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: null
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: null
- Main IPC: H01J009/00
- IPC: H01J009/00 ; H01J009/24 ; H01J001/62

Abstract:
A method of operating and process for fabricating an electron source. A conductive rod is covered by an insulating layer, by dipping the rod in an insulation solution, for example. The rod is then covered by a field emitter material to form a layered conductive rod. The rod may also be covered by a second insulating material. Next, the materials are removed from the end of the rod and the insulating layers are recessed with respect to the field emitter layer so that a gap is present between the field emitter layer and the rod. The layered rod may be operated as an electron source within a vacuum tube by applying a positive bias to the rod with respect to the field emitter material and applying a higher positive bias to an anode opposite the rod in the tube. Electrons will accelerate to the charged anode and generate soft X-rays.
Public/Granted literature
- US07317278B2 Method of operating and process for fabricating an electron source Public/Granted day:2008-01-08
Information query