发明申请
US20040258882A1 Polishing pad with oriented pore structure 有权
具有取向孔结构的抛光垫

Polishing pad with oriented pore structure
摘要:
The invention provides a polishing pad for chemical-mechanical polishing comprising a body, a polishing surface, and a plurality of elongated pores, wherein about 10% or more of the elongated pores have an aspect ratio of about 2:1 or greater and are substantially oriented in a direction that is coplanar with the polishing surface. The invention further provides a method of polishing a substrate.
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