发明申请
- 专利标题: Polishing pad with oriented pore structure
- 专利标题(中): 具有取向孔结构的抛光垫
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申请号: US10463730申请日: 2003-06-17
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公开(公告)号: US20040258882A1公开(公告)日: 2004-12-23
- 发明人: Abaneshwar Prasad
- 申请人: Cabot Microelectronics Corporation
- 申请人地址: US IL Aurora
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 当前专利权人地址: US IL Aurora
- 主分类号: B32B001/00
- IPC分类号: B32B001/00
摘要:
The invention provides a polishing pad for chemical-mechanical polishing comprising a body, a polishing surface, and a plurality of elongated pores, wherein about 10% or more of the elongated pores have an aspect ratio of about 2:1 or greater and are substantially oriented in a direction that is coplanar with the polishing surface. The invention further provides a method of polishing a substrate.
公开/授权文献
- US06998166B2 Polishing pad with oriented pore structure 公开/授权日:2006-02-14
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