发明申请
- 专利标题： Substrate handling system
- 专利标题（中）： 基材处理系统
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申请号： US10837842申请日： 2004-05-03
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公开(公告)号： US20050000454A1公开(公告)日： 2005-01-06
- 发明人: Norman Shaver , Timothy Ellis , David Hill
- 申请人： Norman Shaver , Timothy Ellis , David Hill
- 主分类号： B25J
- IPC分类号： B25J20060101 ; B41C1/00 ; B41C1/05 ; B65H3/16 ; B65H5/04 ; C23C16/00
摘要：
A substrate handling system and method in which an air chuck produces a film of air between the substrate and the air chuck, a magnetic chuck attracts the substrate to the air chuck, and an actuator subsystem moves the magnetic chuck closer to and away from the air chuck to alternately pick up a substrate and release the substrate.
公开/授权文献
- US07371287B2 Substrate handling system 公开/授权日：2008-05-13
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