发明申请
US20050008955A1 Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern
失效
金属或金属化合物图案和图案形成方法，以及使用该图案的电子发射器件，电子源和图像形成装置
- 专利标题： Metal or metal compound pattern and forming method of pattern, and electron emitting device, electron source, and image-forming apparatus using the pattern
- 专利标题（中）： 金属或金属化合物图案和图案形成方法，以及使用该图案的电子发射器件，电子源和图像形成装置
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申请号： US10910273申请日： 2004-08-04
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公开(公告)号： US20050008955A1公开(公告)日： 2005-01-13
- 发明人: Tsuyoshi Furuse , Masahiro Terada , Shosei Mori
- 申请人： Tsuyoshi Furuse , Masahiro Terada , Shosei Mori
- 申请人地址： JP TOKYO
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP TOKYO
- 优先权： JP121193/2001 20010419; JP108791/2002 20020411
- 主分类号： G03F7/00
- IPC分类号： G03F7/00 ; G03F7/40 ; H01J9/02 ; H05K3/10
摘要：
The present invention is to provide a method for forming various patterns such as a metal or metal compound pattern, in which the amounts of the materials constituting the pattern which are removed during the formation step can be suppressed to the minimum. The method comprises a resin pattern forming step of forming on the surface of a substrate a resin pattern capable of absorbing a solution containing metal components, an absorbing step of dipping the resin pattern in the solution containing metal components to make the resin pattern absorb the solution containing metal components, a washing step of washing the substrate having formed thereon the resin pattern that has absorbed the solution containing metal components, and a burning step of burning the resin pattern after washing.