发明申请
- 专利标题： Downward mechanism for support pins
- 专利标题（中）： 支撑销的向下机构
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申请号： US10824433申请日： 2004-04-15
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公开(公告)号： US20050016469A1公开(公告)日： 2005-01-27
- 发明人: Ching-Hong Wong , Hsi-Ming Chang
- 申请人： Ching-Hong Wong , Hsi-Ming Chang
- 优先权： TW92120016 20030722
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; C23C16/458 ; C23C16/54 ; H01L21/205 ; H01L21/687
摘要：
A downward mechanism for support pins is applicable to a reactor of removable type. Support pins are located on the base of the reactor, and each support pin has a base thereunder. The downward mechanism has an elevator mechanism and a board fixed thereto. The board has several holes for the pin and the base to pass respectively therethrough. Each hole elongates into a slit allowing each of the support pins, only, to pass respectively therethrough.
公开/授权文献
- US07250084B2 Downward mechanism for support pins 公开/授权日：2007-07-31
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