Invention Application
- Patent Title: Method for manufacturing thin film transistor array panel
- Patent Title (中): 制造薄膜晶体管阵列面板的方法
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Application No.: US10867811Application Date: 2004-06-16
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Publication No.: US20050019969A1Publication Date: 2005-01-27
- Inventor: Won-Kie Chang , Jin-Wook Lee , Won Song , Jeong-Sik Yoo , You-Keun Kim , Dong-Uk Choi
- Applicant: Won-Kie Chang , Jin-Wook Lee , Won Song , Jeong-Sik Yoo , You-Keun Kim , Dong-Uk Choi
- Priority: KR2003-038713 20030616
- Main IPC: G02F1/1368
- IPC: G02F1/1368 ; B08B7/00 ; C23C16/44 ; G02F1/136 ; H01L21/205 ; H01L21/3065 ; H01L21/336 ; H01L21/77 ; H01L21/84 ; H01L27/12 ; H01L29/786
Abstract:
The present invention relates to a method of manufacturing a thin film transistor array panel and apparatus and more particularly to an apparatus containing an in-situ fluorine generation chamber.
Public/Granted literature
- US07273772B2 Method for manufacturing thin film transistor array panel Public/Granted day:2007-09-25
Information query
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