Invention Application
US20050026076A1 Top anti-reflective coating polymer, its preparation method and anti-reflective coating composition comprising the same 失效
顶级抗反射涂料聚合物,其制备方法和包含其的抗反射涂料组合物

  • Patent Title: Top anti-reflective coating polymer, its preparation method and anti-reflective coating composition comprising the same
  • Patent Title (中): 顶级抗反射涂料聚合物,其制备方法和包含其的抗反射涂料组合物
  • Application No.: US10903076
    Application Date: 2004-07-30
  • Publication No.: US20050026076A1
    Publication Date: 2005-02-03
  • Inventor: Geun Su Lee
  • Applicant: Geun Su Lee
  • Applicant Address: KR Kyungki-Do
  • Assignee: HYNIX SEMICONDUCTOR INC.
  • Current Assignee: HYNIX SEMICONDUCTOR INC.
  • Current Assignee Address: KR Kyungki-Do
  • Priority: KR2003-53097 20030731
  • Main IPC: G03F7/004
  • IPC: G03F7/004 C08F216/06 C08F230/02 G03C1/76 G03F7/09
Top anti-reflective coating polymer, its preparation method and anti-reflective coating composition comprising the same
Abstract:
Disclosed are an organic anti-reflective coating polymer having a structure represented by the following formula I which is introduced to the top portion of photoresist, its preparation method and an anti-reflective coating composition, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF or 157 nm VUV light source. More particularly, the present invention provides an organic anti-reflective coating polymer capable of protecting a photoresist from amine to improve the stability of a post exposure delay and to minimize pattern distortion caused by a swing phenomenon during a patterning process, its preparation method and an anti-reflective coating composition comprising the same. [formula I] wherein each of m and n is an integer ranging from 5 to 5,000.
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