Invention Application
- Patent Title: Top anti-reflective coating polymer, its preparation method and anti-reflective coating composition comprising the same
- Patent Title (中): 顶级抗反射涂料聚合物,其制备方法和包含其的抗反射涂料组合物
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Application No.: US10903076Application Date: 2004-07-30
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Publication No.: US20050026076A1Publication Date: 2005-02-03
- Inventor: Geun Su Lee
- Applicant: Geun Su Lee
- Applicant Address: KR Kyungki-Do
- Assignee: HYNIX SEMICONDUCTOR INC.
- Current Assignee: HYNIX SEMICONDUCTOR INC.
- Current Assignee Address: KR Kyungki-Do
- Priority: KR2003-53097 20030731
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C08F216/06 ; C08F230/02 ; G03C1/76 ; G03F7/09

Abstract:
Disclosed are an organic anti-reflective coating polymer having a structure represented by the following formula I which is introduced to the top portion of photoresist, its preparation method and an anti-reflective coating composition, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF or 157 nm VUV light source. More particularly, the present invention provides an organic anti-reflective coating polymer capable of protecting a photoresist from amine to improve the stability of a post exposure delay and to minimize pattern distortion caused by a swing phenomenon during a patterning process, its preparation method and an anti-reflective coating composition comprising the same. [formula I] wherein each of m and n is an integer ranging from 5 to 5,000.
Public/Granted literature
Information query
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