发明申请
- 专利标题： Capped microsensor
- 专利标题（中）： 带盖微型传感器
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申请号： US10838734申请日： 2004-05-03
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公开(公告)号： US20050028582A1公开(公告)日： 2005-02-10
- 发明人: Frank Schatz , Carsten Raudzis , Mathias Reimann
- 申请人： Frank Schatz , Carsten Raudzis , Mathias Reimann
- 优先权： DE10319661.7 20030502
- 主分类号： H01L23/02
- IPC分类号： H01L23/02 ; B81B7/00 ; G01M3/00 ; G01M3/32 ; G01L9/02 ; G01L21/12 ; G01L27/00
摘要：
A capped microsensor is described. It is suggested that a current conductor, positioned in the cavity and having at least two voltage taps, be provided, this configuration being used for seal testing, e.g., during quality control, by detecting at least one thermodynamic variable of a gaseous medium present inside the cavity via this configuration.
公开/授权文献
- US06986278B2 Capped microsensor 公开/授权日：2006-01-17