HOT-FILM AIR MASS METER HAVING FREQUENCY-MODULATED SIGNAL DETECTION
    1.
    发明申请
    HOT-FILM AIR MASS METER HAVING FREQUENCY-MODULATED SIGNAL DETECTION 有权
    具有频率调制信号检测的热电影空气质量计

    公开(公告)号:US20090314079A1

    公开(公告)日:2009-12-24

    申请号:US11990573

    申请日:2006-06-13

    IPC分类号: G01F1/692

    摘要: A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ω. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ω.

    摘要翻译: 用于测量沿主流动方向流动的空气质量流量的方法和能够实现该方法的热膜空气质量计。 该方法和热膜空气质量计特别适用于内燃机的进气道。 热膜空气质量计包括具有能够流过空气质量流的芯片表面的传感器芯片。 芯片表面依次具有测量表面,测量表面包括具有至少一个中央加热元件和至少两个温度传感器的中心热膜空气质量计电路。 该方法被实施为使得使用频率ωm周期性地加热至少一个中央加热元件。 借助于至少两个温度传感器,至少检测两个测量信号。 测量信号和/或至少两个测量信号的至少一个差分信号使用频率ω进行调制。

    Micromechanical Structure and Method for Setting the Working Gap Width of a Micromechanical Structure
    2.
    发明申请
    Micromechanical Structure and Method for Setting the Working Gap Width of a Micromechanical Structure 审中-公开
    微机械结构和微机械结构工作间隙宽度的设置方法

    公开(公告)号:US20110186944A1

    公开(公告)日:2011-08-04

    申请号:US13055298

    申请日:2009-06-15

    IPC分类号: H01L29/84 H01L21/02

    摘要: A micromechanical structure, includes at least two structure sections configured to bound a working gap, the at least two structure sections being movable relative to one another, and a working gap width setting device configured to broaden the at least one working gap by movement of a first structure section of the at least two structure sections relative to a second structure section of the at least two structure section, the first structure section is stationary relative to a reference point during operation of the micromechanical structure and (ii) the second structure section is movable relative to the reference point during operation.

    摘要翻译: 微机械结构包括至少两个构造成结合工作间隙的结构部分,所述至少两个结构部分可相对于彼此移动;以及工作间隙宽度设定装置,其经配置以通过移动所述至少一个工作间隙 所述至少两个结构部分的第一结构部分相对于所述至少两个结构部分的第二结构部分,所述第一结构部分在所述微机械结构的操作期间相对于参考点是静止的,并且所述第二结构部分是 在运行期间相对于参考点可移动。

    Integrated microstructure sensor element for detecting thermodynamic variables of a fluid
    4.
    发明授权
    Integrated microstructure sensor element for detecting thermodynamic variables of a fluid 有权
    用于检测流体热力学变量的集成微结构传感器元件

    公开(公告)号:US07362105B2

    公开(公告)日:2008-04-22

    申请号:US10150425

    申请日:2002-05-17

    IPC分类号: G01N27/60 G01N25/00 G01N25/18

    CPC分类号: G01N27/18

    摘要: An integrated microstructure sensor element is proposed for detecting thermodynamic measured variables of a fluid. To that end, a supporting body, particularly a board or a wafer having at least one microstructured heating element in contact with the fluid during operation, is provided, on which or in whose vicinity are arranged first arrangement for at least intermittently acting on the heating element with an electric alternating current of defined frequency or a defined frequency band, as well a second arrangement for detecting the amplitude of the third harmonic wave of the electric voltage applied to the heating element. The proposed microstructure sensor element in the form of a compact, integrated component is suitable in particular for determining or monitoring the thermal conductivity and/or the thermal capacity of a fluid, particularly an oil in a motor vehicle.

    摘要翻译: 提出了一种用于检测流体的热力学测量变量的集成微结构传感器元件。 为此,提供了一种支撑体,特别是具有至少一个在操作期间与流体接触的微结构加热元件的板或晶片,其上或其附近被布置成第一布置,用于至少间歇地作用在加热 元件,其具有限定频率或限定频带的电气交流电流,以及用于检测施加到加热元件的电压的三次谐波的振幅的第二装置。 形式为紧凑的集成部件的所提出的微结构传感器元件特别适用于确定或监测机动车辆中的流体,特别是油的热导率和/或热容量。

    Hot-film air mass meter having frequency-modulated signal detection
    6.
    发明授权
    Hot-film air mass meter having frequency-modulated signal detection 有权
    具有调频信号检测的热膜空气质量计

    公开(公告)号:US07861586B2

    公开(公告)日:2011-01-04

    申请号:US11990573

    申请日:2006-06-13

    IPC分类号: G01F1/68

    摘要: A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ω. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ω.

    摘要翻译: 用于测量沿主流动方向流动的空气质量流量的方法和能够实现该方法的热膜空气质量计。 该方法和热膜空气质量计特别适用于内燃机的进气道。 热膜空气质量计包括具有能够流过空气质量流的芯片表面的传感器芯片。 芯片表面依次具有测量表面,测量表面包括具有至少一个中央加热元件和至少两个温度传感器的中心热膜空气质量计电路。 实施该方法使得使用频率ω周期性地加热至少一个中央加热元件。 借助于至少两个温度传感器,至少检测两个测量信号。 使用频率ω调制至少两个测量信号的测量信号和/或至少一个差分信号。

    Capped microsensor
    7.
    发明授权
    Capped microsensor 失效
    带盖微型传感器

    公开(公告)号:US06986278B2

    公开(公告)日:2006-01-17

    申请号:US10838734

    申请日:2004-05-03

    IPC分类号: G01M3/00 G01M3/34

    摘要: A capped microsensor is described. It is suggested that a current conductor, positioned in the cavity and having at least two voltage taps, be provided, this configuration being used for seal testing, e.g., during quality control, by detecting at least one thermodynamic variable of a gaseous medium present inside the cavity via this configuration.

    摘要翻译: 描述了一个封盖的微传感器。 建议设置定位在空腔中并具有至少两个电压抽头的电流导体,该配置用于密封测试,例如在质量控制期间,通过检测内部存在的气态介质的至少一个热力学变量 该腔通过这种配置。

    Capped microsensor
    8.
    发明申请
    Capped microsensor 失效
    带盖微型传感器

    公开(公告)号:US20050028582A1

    公开(公告)日:2005-02-10

    申请号:US10838734

    申请日:2004-05-03

    摘要: A capped microsensor is described. It is suggested that a current conductor, positioned in the cavity and having at least two voltage taps, be provided, this configuration being used for seal testing, e.g., during quality control, by detecting at least one thermodynamic variable of a gaseous medium present inside the cavity via this configuration.

    摘要翻译: 描述了一个封盖的微传感器。 建议设置定位在空腔中并具有至少两个电压抽头的电流导体,该配置用于密封测试,例如在质量控制期间,通过检测内部存在的气态介质的至少一个热力学变量 该腔通过这种配置。