Invention Application
US20050029466A1 Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lens
有权
多极透镜,装有多极透镜的带电粒子束仪器,以及制造多极镜头的方法
- Patent Title: Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lens
- Patent Title (中): 多极透镜,装有多极透镜的带电粒子束仪器,以及制造多极镜头的方法
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Application No.: US10874797Application Date: 2004-06-23
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Publication No.: US20050029466A1Publication Date: 2005-02-10
- Inventor: Eiji Kawai , Joachim Zach , Klaus Hessenauer
- Applicant: Eiji Kawai , Joachim Zach , Klaus Hessenauer
- Applicant Address: JP Akishima
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Akishima
- Priority: JP2003-179523 20030624
- Main IPC: H01J9/18
- IPC: H01J9/18 ; H01J37/141 ; G21K1/08 ; H01J3/14

Abstract:
A multipole lens producing less magnetic field variations is offered. Also, a charged-particle beam instrument fitted with such multipole lenses is offered. The multipole lens has plural polar elements, an annular holding member, and an annular yoke disposed outside the holding member. Each polar element has a held portion and a base-end portion. The held portions of the polar elements are held by the holding member. The yoke is magnetically coupled to the base-end portions of the polar elements. The yoke is provided with openings extending circumferentially. The base-end portions of the polar elements are positioned in the openings.
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