Invention Application
- Patent Title: Process for producing an integrated electronic circuit that includes a capacitor
- Patent Title (中): 一种包括电容器的集成电子电路的制造方法
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Application No.: US10850042Application Date: 2004-05-20
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Publication No.: US20050032303A1Publication Date: 2005-02-10
- Inventor: Philippe Delpech , Christophe Regnier , Sebastien Cremer
- Applicant: Philippe Delpech , Christophe Regnier , Sebastien Cremer
- Applicant Address: FR MONTROUGE
- Assignee: STMICROELECTRONICS SA
- Current Assignee: STMICROELECTRONICS SA
- Current Assignee Address: FR MONTROUGE
- Priority: FR0306031 20030520
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/92 ; H01L21/8234

Abstract:
A process for producing an integrated electronic circuit that includes a capacitor comprises the formation of a stack on top of a substrate (100, 101). The stack comprises a first volume of a temporary material, a second volume (2) of at least one insulating dielectric and a third volume (3) of a first electrically conducting material. After a coating material (4) has been deposited on the stack, the temporary material is removed via access shafts (C1, C2) that are formed between a surface (S) of the circuit and the first volume. The temporary material is then replaced with a second, electrically conducting material.
Public/Granted literature
- US07033887B2 Process for producing an integrated electronic circuit that includes a capacitor Public/Granted day:2006-04-25
Information query
IPC分类: