发明申请
- 专利标题: Molecular pump and connecting device
- 专利标题(中): 分子泵和连接装置
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申请号: US10925050申请日: 2004-08-24
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公开(公告)号: US20050047905A1公开(公告)日: 2005-03-03
- 发明人: Takashi Kabasawa , Yoshiyuki Sakaguchi
- 申请人: Takashi Kabasawa , Yoshiyuki Sakaguchi
- 优先权: JP303526/2003 20030827
- 主分类号: F04D19/04
- IPC分类号: F04D19/04 ; F04D27/02 ; F04D29/52 ; F04D29/60 ; F04D29/64 ; F01D1/36
摘要:
Also, a plurality of connecting portions are selected from these connecting portions, and the connection configuration shown in the first or second embodiment may be used in the selected connecting portions. For example, the connection configuration shown in the first or second embodiment may be used in the connecting portion between the vacuum vessel 2 and the casing 3 and the connecting portion between the casing 3 and the base 10, or may be used in the connecting portion between the vacuum vessel 2 and the casing 3 and the connecting portion between the casing 8 and the casing 9, or may be used in the connecting portion between the casing 8 and the casing 9 and the connecting portion between the casing 3 and the base 10. That is, the connection configuration shown in the first or second embodiment can be used by changing the combination of connecting portions to which the connecting configuration is applied.
公开/授权文献
- US07341423B2 Molecular pump and connecting device 公开/授权日:2008-03-11
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