发明申请
- 专利标题： Method and equipment for simulation
- 专利标题（中）： 模拟方法和设备
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申请号： US10782821申请日： 2004-02-23
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公开(公告)号： US20050050490A1公开(公告)日： 2005-03-03
- 发明人: Hiroki Futatsuya , Satoru Asai
- 申请人： Hiroki Futatsuya , Satoru Asai
- 申请人地址： JP Kawasaki
- 专利权人： FUJITSU LIMITED
- 当前专利权人： FUJITSU LIMITED
- 当前专利权人地址： JP Kawasaki
- 优先权： JP2003-308919 20030901
- 主分类号： G03F1/36
- IPC分类号： G03F1/36 ; G03F1/68 ; G06F17/50 ; G06G7/62 ; G06K9/00 ; H01L21/027
摘要：
The simulation equipment has division unit for dividing a layout of a photo mask (mask layout) into a plurality of areas, average light intensity value calculation unit for calculating an average value of light intensity in each of the areas, smoothing unit for subjecting the calculated average value to smoothing processing, and multiplication unit for multiplying the smoothed average value by a predetermined multiplier.
公开/授权文献
- US07577556B2 Method and equipment for simulation 公开/授权日：2009-08-18
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