发明申请
US20050054883A1 Novel compound, fluorine-containing polymerizable cyclic olefin compound 有权
新型化合物,含氟可聚合环烯烃化合物

Novel compound, fluorine-containing polymerizable cyclic olefin compound
摘要:
There is disclosed a fluorine-containing polymerizable cyclic olefin compound that has one or more partial structures represented by the following general formula (1) or (2). There can be provided a novel fluorine-containing polymerizable cyclic olefin compound which is excellent in transparency to irradiation, for example, at a wavelength of 200 nm or less, especially at a wavelength of 160 nm or less and dry etching resistance, has low hydrophobicity, and is excellent in development characteristics, and thus is useful as a raw material for a base resin of photoresist composition.
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