发明申请
- 专利标题: Novel compound, fluorine-containing polymerizable cyclic olefin compound
- 专利标题(中): 新型化合物,含氟可聚合环烯烃化合物
-
申请号: US10918465申请日: 2004-08-16
-
公开(公告)号: US20050054883A1公开(公告)日: 2005-03-10
- 发明人: Takeru Watanabe , Takeshi Kinsho , Yuji Harada
- 申请人: Takeru Watanabe , Takeshi Kinsho , Yuji Harada
- 申请人地址: JP Tokyo 100-0004
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo 100-0004
- 优先权: JP2003-318803 20030910
- 主分类号: C07C31/38
- IPC分类号: C07C31/38 ; C07C29/143 ; C07C29/38 ; C07C29/40 ; C07C33/44 ; C07C35/52 ; C07C41/50 ; C07C43/178 ; C07C45/00 ; C07C45/45 ; C07C45/52 ; C07C49/24 ; C07C49/242 ; C07C231/08 ; C07C233/18 ; C07C303/36 ; C07C311/04 ; C07C319/14 ; C07C323/15 ; C08F32/00 ; C08F32/08 ; G03F7/004 ; G03F7/039 ; C07C49/297 ; C07C69/02
摘要:
There is disclosed a fluorine-containing polymerizable cyclic olefin compound that has one or more partial structures represented by the following general formula (1) or (2). There can be provided a novel fluorine-containing polymerizable cyclic olefin compound which is excellent in transparency to irradiation, for example, at a wavelength of 200 nm or less, especially at a wavelength of 160 nm or less and dry etching resistance, has low hydrophobicity, and is excellent in development characteristics, and thus is useful as a raw material for a base resin of photoresist composition.
公开/授权文献
信息查询