Invention Application
- Patent Title: Low coherence grazing incidence interferometry systems and methods
- Patent Title (中): 低相干掠入射干涉测量系统和方法
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Application No.: US10941631Application Date: 2004-09-15
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Publication No.: US20050057757A1Publication Date: 2005-03-17
- Inventor: Xavier Colonna De Lega , Peter De Groot , Michael Kuchel
- Applicant: Xavier Colonna De Lega , Peter De Groot , Michael Kuchel
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/00 ; G01B11/06 ; G03F7/20 ; G03F9/00

Abstract:
An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light pattern and has a reference surface. The low coherence interferometer has a reference optical path and a measurement optical path. Light that passes along the reference optical path reflects at least once from the reference surface and light that passes along the measurement optical path reflects at least once from the object. The detector is configured to detect a low coherence interference signal including light that has passed along the reference optical path and light that has passed along the measurement optical path. The low coherence interference signal is indicative of a spatial relationship between the reference surface and the object.
Public/Granted literature
- US07289224B2 Low coherence grazing incidence interferometry for profiling and tilt sensing Public/Granted day:2007-10-30
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