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公开(公告)号：US20050057757A1
公开(公告)日：2005-03-17
申请号：US10941631
申请日：2004-09-15
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： An optical system includes a photolithography system, a low coherence interferometer, and a detector. The photolithography system is configured to illuminate a portion of an object with a light pattern and has a reference surface. The low coherence interferometer has a reference optical path and a measurement optical path. Light that passes along the reference optical path reflects at least once from the reference surface and light that passes along the measurement optical path reflects at least once from the object. The detector is configured to detect a low coherence interference signal including light that has passed along the reference optical path and light that has passed along the measurement optical path. The low coherence interference signal is indicative of a spatial relationship between the reference surface and the object.
摘要翻译： 光学系统包括光刻系统，低相干干涉仪和检测器。 光刻系统被配置为用光图案照射物体的一部分并具有参考表面。 低相干干涉仪具有参考光路和测量光路。 沿着基准光路通过的光至少从参考面反射一次，并且沿测量光路通过的光至少反射一次。 检测器被配置为检测包括沿着参考光路已经通过的光和沿着测量光路已经通过的光的低相干干涉信号。 低相干干涉信号指示参考表面和对象之间的空间关系。
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公开(公告)号：US4872755A
公开(公告)日：1989-10-10
申请号：US164790
申请日：1988-03-07
申请人： Michael Kuchel
发明人： Michael Kuchel
CPC分类号： G01J9/02 , G01B9/02038 , G01B9/02065 , G01B9/02098 , G01J2009/0249 , G01J9/0215 , G02B6/2861
摘要： For generating several interferograms which differ from each other in the relative phase position between the interfering partial beams, a light source is utilized having a coherence length less than the optical path difference between the two component beams in the measuring path of the interferometer. Furthermore, at least one optical delay device is provided which splits the beam into two component beams and which generates an optical path difference between these component beams which is approximately the same as the optical path difference of the partial beams in the measuring path of the interferometer. Thereafter, the delay device again unites the component beams congruently.
摘要翻译： 为了在干涉分光束之间的相对相位位置中产生彼此不同的几个干涉图，利用了具有小于干涉仪的测量路径中的两个分量光束之间的光程差的相干长度的光源。 此外，提供至少一个光学延迟装置，其将光束分成两个分量光束，并且在这些分量光束之间产生与干涉仪的测量路径中的部分光束的光程差大致相同的光程差 。 此后，延迟装置再次将分量光束一并整合。
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公开(公告)号：US5357341A
公开(公告)日：1994-10-18
申请号：US912285
申请日：1992-07-13
CPC分类号： G01B9/02007 , G01B9/02057 , G01B9/02069 , G01B9/02087 , G01B2290/45 , G01B2290/70
摘要： The invention relates to an evaluation method for interferograms and an interferometer corresponding thereto with which tile influence of coherent noise is reduced with simultaneously high interference contrast. Several phase maps are computed from interferograms which are recorded with coherent light. The interferogram components of the test object and the interferogram components of the coherent noise are displaced relative to each other in the camera plane between recording the interferograms. The influence of the coherent noise is suppressed by subsequently averaging the phase maps.
摘要翻译： 本发明涉及一种用于干涉图的评估方法和与之对应的干涉仪，其中相干噪声的瓦片影响同时具有高的干涉对比度而降低。 用相干光记录的干涉图计算出几个相位图。 测试对象的干涉图分量和相干噪声的干涉图分量在记录干涉图之间在相机平面中相对于彼此移位。 随后对相位图进行平均，抑制相干噪声的影响。
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公开(公告)号：US5343294A
公开(公告)日：1994-08-30
申请号：US898158
申请日：1992-06-15
申请人： Michael Kuchel , Albrecht Hof
发明人： Michael Kuchel , Albrecht Hof
CPC分类号： G06T7/0057 , G01B11/2531
摘要： The present invention relates to a method for evaluating fringe images, in particular, for topographic measurements. During a first step, several phase-displaced patterns are recorded sequentially in time, and the respective phase relations of these patterns are determined by evaluation in the spatial domain (14a, 14b, 15). During a second step, after the phase shifts have been determined accurately in this manner based on the video images themselves, a pixel-by-pixel evaluation of the phase-displaced pattern is performed in the time domain. The invention also includes computer hardware for performing the evaluation of the strip images in video real time.
摘要翻译： 本发明涉及一种用于评估边缘图像的方法，特别是用于地形测量。 在第一步骤中，在时间上顺序地记录几个相位移模式，并且通过在空间域（14a，14b，15）中的评估来确定这些模式的各自的相位关系。 在第二步骤中，在基于视频图像本身以这种方式精确地确定了相移之后，在时域中执行相移位图案的逐像素评估。 本发明还包括用于以视频实时执行条形图像的评估的计算机硬件。
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5.发明授权
公开(公告)号：US5106194A
公开(公告)日：1992-04-21
申请号：US648199
申请日：1991-01-31
申请人： Michael Kuchel
发明人： Michael Kuchel
CPC分类号： G01B11/306
摘要： A relatively simple interferometric method for the absolute testing of plane surfaces is disclosed, along with special apparatus for carrying out the inventive method. Two plane surfaces to be tested (A.sub.6,B.sub.6) are inserted simultaneously into the interferometer's measuring-beam path so that the measuring beam is reflected from each plane surface at two respective and different incident angles (.alpha., .beta.). During successive steps, the plane surfaces (A.sub.6,B.sub.6) are angularly repositioned and shifted so that at least one of the incident angles (.alpha., .beta.) is changed. Interferograms are recorded during each step and analyzed mathematically.
摘要翻译： 公开了一种用于平面的绝对测试的相对简单的干涉测量方法，以及用于实施本发明方法的专用设备。 要测试的两个平面（A6，B6）同时插入到干涉仪的测量光束路径中，使得测量光束以两个相应和不同的入射角（α，β）从每个平面表面反射。 在连续的步骤中，平面表面（A6，B6）被角度地重新定位并移位，使得入射角（α，β）中的至少一个被改变。 在每个步骤中记录干涉图，并在数学上进行分析。
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公开(公告)号：US5042041A
公开(公告)日：1991-08-20
申请号：US593894
申请日：1990-10-05
申请人： Uwe Vry , Klaus Freischlad , Michael Kuchel , Andreas Dorsel
发明人： Uwe Vry , Klaus Freischlad , Michael Kuchel , Andreas Dorsel
CPC分类号： H01S5/0622 , H01S5/06213 , H01S5/4025 , H01S5/0427 , H01S5/0652
摘要： The injection current for a laser diode is modulated so that a pregiven coherence function is obtained which drops off continuously at both ends outside of the coherence length. Several laser diodes are used for a very short coherence length for which the modulated wave numbers of the emitted radiation follow one another or overlap.
摘要翻译： 对激光二极管的注入电流进行调制，从而获得在相干长度以外的两端连续下降的预先相干函数。 几个激光二极管用于非常短的相干长度，其中发射的辐射的调制波数彼此相邻或重叠。
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公开(公告)号：US20050157311A1
公开(公告)日：2005-07-21
申请号：US11064731
申请日：2005-02-24
申请人： Michael Kuchel
发明人： Michael Kuchel
IPC分类号： G01B9/02 , G01B11/24 , G01B11/255 , G01M11/02 , G01B11/02
CPC分类号： G01M11/0257 , G01B9/02019 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B9/02081 , G01B9/02087 , G01B11/2441 , G01B11/255 , G01B2290/45 , G01B2290/70 , G01M11/025 , G01M11/0271
摘要： Interferometric scanning method(s) and apparatus for measuring rotationally and non-rotationally symmetric test optics either having aspherical surfaces or that produce aspherical wavefronts. A spherical or partial spherical wavefront is generated from a known location along a scanning axis though the use of a decollimator carrying a spherical reference surface. The test optic is aligned with respect to the scanning axis and selectively moved along it relative to the known origin so that the spherical wavefront intersects the test optic at the apex of the aspherical surface and at radial zones where the spherical wavefront and the aspheric surface possess common tangents. The test surface is imaged onto a space resolving detector to form interferograms containing phase information about the differences in optical path length between the spherical reference surface and the test surface while the axial distance, v, by which said test optic moves relative to said spherical reference surface is interferometrically measured. Based on an analysis of the phase information contained in the interferograms and the axial distance, v, the deviation in the shape of the aspheric surface from its design in a direction normal to the aspheric surface is determined. In scanning, two cameras having different magnification are preferably used simultaneously with the one of higher magnification observing near the part axis where high fringe densities occur while that of lower magnification observes the full part surface. Special procedures are described for alternately improving accuracy near the axis.
摘要翻译： 用于测量具有非球面或产生非球面波前的旋转和非旋转对称测试光学器件的干涉测量扫描方法和装置。 通过使用带有球面参考表面的折射器，沿着扫描轴从已知位置产生球面或部分球面波前。 测试光学器件相对于扫描轴线对齐并且相对于已知原点被选择性地移动，使得球面波前在非球面的顶点处和在球面波前和非球面表面具有的径向区域处与测试光学器件相交 常切线 将测试表面成像到空间分辨检测器上以形成干涉图，该干涉图包含关于球形参考表面和测试表面之间的光程长度差异的相位信息，而所述测试光学器件相对于所述球形参考的轴向距离v 表面被干涉测量。 基于干涉图中包含的相位信息和轴向距离v的分析，确定非球面形状在与非球面垂直的方向上的设计中的偏离。 在扫描中，优选同时使用具有不同放大倍数的两个相机，其中在附近出现高边缘密度的部分轴附近观察到较高倍率的观察者之一，而较低倍率观察到全部分表面。 描述了用于交替提高轴附近精度的特殊程序。
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公开(公告)号：US20050083537A1
公开(公告)日：2005-04-21
申请号：US10967982
申请日：2004-10-19
申请人： Michael Kuchel
发明人： Michael Kuchel
CPC分类号： G01B11/2441 , G01B9/02007 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01J9/02 , G01M11/025 , G01M11/0271
摘要： Interferometric apparatus and methodology for precisely measuring the shape of rotationally and non-rotationally symmetric optical surfaces comprising an illumination source with two wavelengths, a transmission flat with a reference surface, a basic optical system for producing a wavefront of predetermined shape, a compensation component having an aspheric wavefront shaping surface and an aspheric reference surface. The aspheric shaping surface modifies the predetermined wavefront so that it impinges on the aspheric reference surface with a shape substantially that same as that of aspheric reference surface. For a given aspheric reference surface, the radius or curvature and spacing of the aspheric shaping surface are optimized so that its aspheric departure is no larger than that of the aspheric reference surface. Precise alignment in six degrees of freedom is provided via feedback control.
摘要翻译： 用于精确测量旋转和非旋转对称光学表面的形状的干涉测量装置和方法，包括具有两个波长的照明源，具有参考表面的透射平面，用于产生预定形状的波前的基本光学系统，具有 非球面波前成形表面和非球面参考表面。 非球面成形表面修改预定波前，使得其以非球面参考表面的形状大致相同的形状撞击在非球面参考表面上。 对于给定的非球面参考表面，非球面成形表面的半径或曲率和间距被优化，使得其非球面偏离不大于非球面参考表面的偏心。 通过反馈控制提供六自由度的精确对准。
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公开(公告)号：US06717680B1
公开(公告)日：2004-04-06
申请号：US10144527
申请日：2002-05-13
申请人： Michael Kuchel , Leslie L. Deck
发明人： Michael Kuchel , Leslie L. Deck
IPC分类号： G01B902
CPC分类号： G01B11/306 , G01B9/02002 , G01B9/02004 , G01B9/02057 , G01B9/02064 , G01B11/2441 , G01B2290/70
摘要： The invention extends and improves the basic technique of phase-shifting interferometry by minimizing the measurement errors introduced by additional unwanted reflections from surfaces and surface defects far from the surface of interest. The inventive phase shifting interferometer includes at least two independent phase shifters. The two phase shifters operate cooperatively to produce a particular desired cavity interference modulation frequency while the modulation frequency of interference produced from other sources is significantly altered.
摘要翻译： 本发明通过最小化从远离感兴趣的表面的表面和表面缺陷的附加不需要的反射引入的测量误差来扩展和改进相移干涉测量的基本技术。 本发明的相移干涉仪包括至少两个独立的移相器。 两个移相器协同工作以产生特定的期望腔干扰调制频率，而从其它源产生的干扰的调制频率被显着地改变。
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公开(公告)号：US5135309A
公开(公告)日：1992-08-04
申请号：US666247
申请日：1991-03-08
申请人： Michael Kuchel , Albrecht Hof
发明人： Michael Kuchel , Albrecht Hof
CPC分类号： G06T7/0057 , G01B11/2531
摘要： Several bar patterns are projected in sequence on the object (O) to be measured by time-division multiplexing, and images of the bar patterns are recorded by a camera (K). The phases of each bar pattern, as distorted by the object, are calculated for preselected image points by a computer connected with the camera. For each image point, the calculated phases for one of said bar patterns are compared to the phases calculated for at least one other of said bar patterns, thereby producing a beat frequency which can be used to determine height measurements in the direction of the camera axis (z). In order to increase the range of the height measurements, at least two beat frequencies of quite different effective wavelengths are generated and evaluated. Different systems are disclosed for generating the different beat frequencies. In one embodiment, the bar patterns are projected by three different projectors (P.sub.1, P.sub.2, P.sub.3) which are inclined at different angles relative to each other (.alpha..sub.1, .alpha..sub.2). In a second embodiment, only two projectors are used, but each projector has two gratings, the respective periods of which differ from each other only slightly.
摘要翻译： 通过时分多路复用将待测物体（O）上的几个条形图案依次投影，并通过照相机（K）记录条形图案。 通过与相机连接的计算机为预选图像点计算每个条形图案的由对象扭曲的相位。 对于每个图像点，将所述条形图案中的一个的计算的相位与针对所述条形图案中的至少另一个计算的相位进行比较，从而产生拍频，其可用于确定相机轴方向上的高度测量值 （z）。 为了增加高度测量的范围，产生和评估至少两个完全不同有效波长的拍频。 公开了用于产生不同拍频的不同系统。 在一个实施例中，条形图案由相对于彼此以不同角度（α1，α2）倾斜的三个不同的投影仪（P1，P2，P3）投射。 在第二实施例中，仅使用两个投影仪，但是每个投影仪具有两个光栅，其各自的周期彼此稍微不同。
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