发明申请
US20050068834A1 Magnetic random access memory (MRAM) having a magnetic tunneling junction (MTJ) layer including a tunneling film of uniform thickness and method of manufacturing the same
有权
具有磁隧道结(MTJ)层的磁性随机存取存储器(MRAM)包括均匀厚度的隧穿膜及其制造方法
- 专利标题: Magnetic random access memory (MRAM) having a magnetic tunneling junction (MTJ) layer including a tunneling film of uniform thickness and method of manufacturing the same
- 专利标题(中): 具有磁隧道结(MTJ)层的磁性随机存取存储器(MRAM)包括均匀厚度的隧穿膜及其制造方法
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申请号: US10948633申请日: 2004-09-24
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公开(公告)号: US20050068834A1公开(公告)日: 2005-03-31
- 发明人: Tae-wan Kim , Sang-jin Park
- 申请人: Tae-wan Kim , Sang-jin Park
- 优先权: KR2003-66952 20030926
- 主分类号: G11C11/15
- IPC分类号: G11C11/15 ; G11C11/16 ; H01F10/06 ; H01F10/32 ; H01F41/30 ; H01L21/8246 ; H01L27/105 ; H01L27/115 ; H01L43/08 ; H01L43/12
摘要:
A magnetic random access memory (MRAM), and a method of manufacturing the same, includes a cell including a transistor and a magnetic tunneling junction (MTJ) layer connected to the transistor, wherein the MTJ layer includes a lower electrode, a lower magnetic film, a tunneling film having a uniform thickness and a substantially flat upper surface, and an upper magnetic film, wherein the lower electrode includes a first lower electrode and an amorphous second lower electrode. An amorphous flattening film may be further formed between the lower electrode and the lower magnetic film.
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