发明申请
- 专利标题: Method of producing multilayer wired circuit board
- 专利标题(中): 生产多层布线电路板的方法
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申请号: US10959108申请日: 2004-10-07
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公开(公告)号: US20050079652A1公开(公告)日: 2005-04-14
- 发明人: Mineyoshi Hasegawa , Kei Nakamura , Toshikazu Baba
- 申请人: Mineyoshi Hasegawa , Kei Nakamura , Toshikazu Baba
- 专利权人: NITTO DENKO CORPORATION
- 当前专利权人: NITTO DENKO CORPORATION
- 优先权: JP2003-350694 20031009
- 主分类号: H05K1/00
- IPC分类号: H05K1/00 ; H05K3/00 ; H05K3/38 ; H05K3/42 ; H05K3/46 ; H01L21/44
摘要:
A method of producing a multilayer wired circuit board that can suppress making gouge in an adhesive layer when a hole is formed by irradiation with a laser beam, to provide a smoothened inside surface of the hole so as to provide enhanced reliability of electrical connection. A first substrate 4 having the structure wherein a first metal foil 2 and a second metal foil 3 are formed on both sides of a first insulating layer 1 and a second substrate 7 having the structure wherein a third metal foil 6 is formed on a single side of a second insulating layer 5 are prepared, separately. Then, the first metal foil 2 of the first substrate 4 and the second insulating layer 5 of the second substrate 7 are bonded together through an adhesive layer 8. Thereafter, the resultant laminate is irradiated with a laser beam emitting from the first substrate 4 side toward the second substrate 7 side, to form a through hole 9. When the through hole 9 is formed, the adhesive layer 8 is irradiated with the laser beam decayed in energy after applied to the second metal foil 3 and the first metal foil 2. Hence, the adhesive layer can be prevented from being gouged by thermal decomposition, and as such can permit a smoothened inside surface of the through hole 9.
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