Invention Application
- Patent Title: Method and apparatus for depositing material
- Patent Title (中): 沉积材料的方法和装置
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Application No.: US10690704Application Date: 2003-10-23
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Publication No.: US20050087131A1Publication Date: 2005-04-28
- Inventor: Max Shtein , Stephen Forrest , Joe Michels
- Applicant: Max Shtein , Stephen Forrest , Joe Michels
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/12 ; H01L51/00 ; H01L51/30 ; H01L51/40 ; C23C16/00 ; B05D3/00

Abstract:
A method of depositing organic material is provided. A carrier gas carrying an organic material is ejected from a nozzle at a flow velocity that is at least 10% of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate. In some embodiments, the dynamic pressure in a region between the nozzle and the substrate surrounding the carrier gas is at least 1 Torr, and more preferably 10 Torr, during the ejection. In some embodiments, a guard flow is provided around the carrier gas. In some embodiments, the background pressure is at least about 10e-3 Torr, more preferably about 0.1 Torr, more preferably about 1 Torr, more preferably about 10 Torr, more preferably about 100 Torr, and most preferably about 760 Torr. A device is also provided. The device includes a nozzle, which further includes a nozzle tube having a first exhaust aperture and a first gas inlet; and a jacket surrounding the nozzle tube, the jacket having a second exhaust aperture and a second gas inlet. The second exhaust aperture completely surrounds the first tube aperture. A carrier gas source and an organic source vessel may be connected to the first gas inlet. A guard flow gas source may be connected to the second gas inlet. The device may include an array of such nozzles.
Public/Granted literature
- US07744957B2 Method and apparatus for depositing material Public/Granted day:2010-06-29
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