Invention Application
- Patent Title: Semiconductor-on-insulator chip incorporating strained-channel partially-depleted, fully-depleted, and multiple-gate transistors
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Application No.: US10999564Application Date: 2004-11-29
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Publication No.: US20050093067A1Publication Date: 2005-05-05
- Inventor: Yee-Chia Yeo , How-Yu Chen , Chien-Chao Huang , Wen-Chin Lee , Fu-Liang Yang , Chenming Hu
- Applicant: Yee-Chia Yeo , How-Yu Chen , Chien-Chao Huang , Wen-Chin Lee , Fu-Liang Yang , Chenming Hu
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/84 ; H01L27/12 ; H01L29/786 ; H01L27/01

Abstract:
In accordance with a preferred embodiment of the present invention, a silicon-on-insulator (SOI) chip includes a silicon layer of a predetermined thickness overlying an insulator layer. A multiple-gate fully-depleted SOI MOSFET including a strained channel region is formed on a first portion of the silicon layer. A planar SOI MOSFET including a strained channel region formed on another portion of the silicon layer. For example, the planar SOI MOSFET can be a planar fully-depleted SOI (FD-SOI) MOSFET or the planar SOI MOSFET can be a planar partially-depleted SOI (PD-SOI) MOSFET.
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Information query
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