发明申请
US20050097727A1 Multi-layer wiring board, method for producing multi-layer wiring board, polishing machine for multi-layer wiring board, and metal sheet for producing wiring board
审中-公开
多层布线板,多层布线板的制造方法,多层布线板的研磨机,以及制造布线板的金属板
- 专利标题: Multi-layer wiring board, method for producing multi-layer wiring board, polishing machine for multi-layer wiring board, and metal sheet for producing wiring board
- 专利标题(中): 多层布线板,多层布线板的制造方法,多层布线板的研磨机,以及制造布线板的金属板
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申请号: US10450844申请日: 2002-03-27
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公开(公告)号: US20050097727A1公开(公告)日: 2005-05-12
- 发明人: Tomoo Iijima , Yoshiro Kato , Hiroshi Odaira , Masayuki Ohsawa , Inetaro Kurosawa , Kazuo Sakuma , Toshihiko Asano , Kimitaka Endo
- 申请人: Tomoo Iijima , Yoshiro Kato , Hiroshi Odaira , Masayuki Ohsawa , Inetaro Kurosawa , Kazuo Sakuma , Toshihiko Asano , Kimitaka Endo
- 优先权: JP2001-092698 20010328; JP2001-285175 20010919; JP2001-383887 20011218; JP2002-034798 20020213
- 国际申请: PCT/JP02/02982 WO 20020327
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B7/22 ; B24B37/04 ; H05K3/06 ; H05K3/40 ; H05K3/46 ; H01R3/00 ; B23P19/00
摘要:
A plurality of multi-layer metal plates (1) each being composed of a bump forming metal layer (2), an etching stop layer (3), and a wiring film forming metal layer (4), and in which a wiring film (4a) is formed from the wiring film forming metal layer and a bump 2a is formed from the bump forming metal layer are prepared, and on a bump forming surface of a multi-layer metal plate, a wiring film of another multi-layer metal plate is overlapped. Such lamination process is repeated in succession for multi-layering. In addition, a polishing machine for multi-layer wiring board (11a) which includes metal plate holding means (13) for holding a metal plate (1a), cutter holding means (25) for holding a cutter (26) above the metal plate, height adjustment mechanism (20) for adjusting the height of the cutter holding means, and cutter parallel moving mechanism (15) for relatively moving the cutter holding means in parallel to the surface of the metal plate is used to conduct polishing.
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