发明申请
- 专利标题： Method of manufacturing an electroconductive film, and an apparatus including it
- 专利标题（中）： 导电膜的制造方法及其制造方法
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申请号： US10624546申请日： 2003-07-23
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公开(公告)号： US20050101051A1公开(公告)日： 2005-05-12
- 发明人: Yoshimi Uda , Kazuya Ishiwata , Shinsaku Kubo , Yasuyuki Watanabe
- 申请人： Yoshimi Uda , Kazuya Ishiwata , Shinsaku Kubo , Yasuyuki Watanabe
- 优先权： JP280505/2000 20000914
- 主分类号： H01J9/02
- IPC分类号： H01J9/02 ; H05K1/09 ; H05K3/02 ; H05K3/24 ; H01L21/00 ; H01L21/311 ; H01L21/44
摘要：
In a method of manufacturing an electroconductive film, a developing process is implemented on a photosensitive paste layer (12) having a height of about 13 μm in a state where exposure is repeated twice in FIG. 1D, and thereafter, a baking process is completed to form a wiring pattern (20). As a result, the curling of an edge formed in the wiring pattern (20) can be remarkably reduced.
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