发明申请
- 专利标题: Electrical characteristic measuring probe and method of manufacturing the same
- 专利标题(中): 电气特性测量探头及其制造方法
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申请号: US10980162申请日: 2004-11-04
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公开(公告)号: US20050110507A1公开(公告)日: 2005-05-26
- 发明人: Naoyuki Koizumi , Akinori Shiraishi , Kei Murayama
- 申请人: Naoyuki Koizumi , Akinori Shiraishi , Kei Murayama
- 申请人地址: JP Nagano-shi
- 专利权人: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- 当前专利权人: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- 当前专利权人地址: JP Nagano-shi
- 优先权: JP2003-395830 20031126
- 主分类号: G01R1/067
- IPC分类号: G01R1/067 ; G01R1/073 ; G01R3/00 ; H01L21/66 ; G01R31/02
摘要:
In an electrical characteristic measuring probe of the present invention constructed by assembling a plurality of probe parts, each comprising a base portion, a plurality of terminal portions extended outward from one end of the base portion, wiring patterns extended from a plurality of terminal portions onto the base portion respectively, and contact portions connected to the wiring patterns respectively, a plurality of thin plate-like probe parts are aligned such that respective thin-plate surfaces are placed in parallel with each other and the contact portions are directed in the same direction, and a plurality of probe parts and spacers are fixed by fixing means in a state that the spacer is arranged between a plurality of probe parts respectively.
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