发明申请
US20050116549A1 Coil support unit, motor and exposure apparatus using the same, and device manufacturing method
失效
线圈支撑单元，使用其的电动机和曝光装置以及装置制造方法
- 专利标题： Coil support unit, motor and exposure apparatus using the same, and device manufacturing method
- 专利标题（中）： 线圈支撑单元，使用其的电动机和曝光装置以及装置制造方法
-
申请号： US10973469申请日： 2004-10-27
-
公开(公告)号： US20050116549A1公开(公告)日： 2005-06-02
- 发明人: Atsushi Ito
- 申请人： Atsushi Ito
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2003-399884 20031128
- 主分类号： H01L21/027
- IPC分类号： H01L21/027 ; G03F7/20 ; H02K9/19 ; H02K41/02 ; H02K41/03 ; H02K41/00 ; G03B27/52 ; G03B27/58
摘要：
An object of a coil support unit which supports a coil for generating a thrust to a movable portion is to support the coil such that stable thrust characteristics can be obtained. The coil support unit is characterized by constraining the coil in a thrust direction, and slidably supporting the coil in a direction perpendicular to the thrust direction on a moving surface.
公开/授权文献
信息查询
IPC分类:
