发明申请
- 专利标题： Movable apparatus, a measuring apparatus, a capacitive distance sensing apparatus, and a positioning device
- 专利标题（中）： 可移动装置，测量装置，电容式距离感测装置和定位装置
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申请号： US10984716申请日： 2004-11-09
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公开(公告)号： US20050118859A1公开(公告)日： 2005-06-02
- 发明人: Hideki Wakamatsu
- 申请人： Hideki Wakamatsu
- 专利权人： AGILENT TECHNOLOGIES, INC.
- 当前专利权人： AGILENT TECHNOLOGIES, INC.
- 优先权： JP2003-398840 20031128
- 主分类号： G01B7/00
- IPC分类号： G01B7/00 ; G01D5/241 ; G12B5/00 ; H01R13/58
摘要：
The movable apparatus of a positioning device comprising a conductive stationary part and a conductive movable part, the stationary part has an electrode constituting a capacitor together with said movable part, and the electrode is covered by a guard electrode insulated from the stationary part, whereby a triaxial structure is formed around these electrodes.