发明申请
- 专利标题: Scanning electron microscope
- 专利标题(中): 扫描电子显微镜
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申请号: US11006556申请日: 2004-12-08
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公开(公告)号: US20050127294A1公开(公告)日: 2005-06-16
- 发明人: Junichi Katane , Sukehiro Ito
- 申请人: Junichi Katane , Sukehiro Ito
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION,HITACHI SCIENCE SYSTEMS, LTD.
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION,HITACHI SCIENCE SYSTEMS, LTD.
- 优先权: JP2003-413782 20031211
- 主分类号: H01J37/244
- IPC分类号: H01J37/244 ; G01N23/00 ; H01J37/28
摘要:
A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.
公开/授权文献
- US07154089B2 Scanning electron microscope 公开/授权日:2006-12-26