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    Scanning Electron Microscope
    1.
    发明申请
    Scanning Electron Microscope 有权
    扫描电子显微镜

    公开(公告)号：US20080035843A1

    公开(公告)日：2008-02-14

    申请号：US11768291

    申请日：2007-06-26

    申请人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

    发明人： Michio Hatano ,  Sukehiro Ito ,  Shinichi Tomita ,  Junichi Katane

    IPC分类号： H01J49/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2444 ,  H01J2237/24445 ,  H01J2237/24495 ,  H01J2237/2605 ,  H01J2237/28

    摘要： In a scanning electron microscope, a reflection plate at ground potential is provided in a specimen chamber and backscattering electrons given off from a specimen impinge on the reflection plate to generate subsidiary electrons. An electric field supply electrode applied with a positive voltage of +100 to +500V is arranged in a gap defined by the reflection plate and a specimen stage. A first detection electrode is arranged to detect ion current attributable to backscattering electrons and a second detection electrode is arranged to detect current representative of coexistence of ion currents attributable to secondary electron and backscattering electron. The scanning electron microscope constructed as above can achieve simultaneous separation/detection of secondary electron and backscattering electron.

    摘要翻译： 在扫描型电子显微镜中，在试样室内设置接地电位的反射板，反射散射从试样射出的电子撞击在反射板上，产生副电子。 施加+100〜+ 500V的正电压的电场供给电极被配置在由反射板和样本台所限定的间隙中。 布置第一检测电极以检测归因于后向散射电子的离子电流，并且布置第二检测电极以检测代表归属于二次电子和后向散射电子的离子电流共存的电流。 如上构造的扫描电子显微镜可以实现二次电子和后向散射电子的同时分离/检测。

    Scanning electron microscope
    2.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US07154089B2

    公开(公告)日：2006-12-26

    申请号：US11006556

    申请日：2004-12-08

    申请人： Junichi Katane ,  Sukehiro Ito

    发明人： Junichi Katane ,  Sukehiro Ito

    IPC分类号： G01N23/00

    CPC分类号： H01J37/28 ,  H01J2237/2448 ,  H01J2237/2449

    摘要： A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.

    摘要翻译： 公开了一种扫描电子显微镜，其中从样品产生的二次电子被二次电子检测器有效地捕获，通过校正和控制二次电子的轨迹。 在物镜下方的一次电子束的放射孔附近配置有数十〜数十伏的负电位的第一辅助电极，并且在侧面配置施加正电压的第二辅助电极 的第二辅助电极，从而校正和控制二次电子的轨迹。 此外，在二次电子检测器的前表面上布置有用于辅助捕获从试样产生的二次电子的第三辅助电极。

    Scanning electron microscope
    5.
    发明申请
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US20050127294A1

    公开(公告)日：2005-06-16

    申请号：US11006556

    申请日：2004-12-08

    申请人： Junichi Katane ,  Sukehiro Ito

    发明人： Junichi Katane ,  Sukehiro Ito

    IPC分类号： H01J37/244 ,  G01N23/00 ,  H01J37/28

    CPC分类号： H01J37/28 ,  H01J2237/2448 ,  H01J2237/2449

    摘要： A scanning electron microscope in which the secondary electrons generated from a specimen are efficiently caught by a secondary electron detector by correcting and controlling the trajectory of the secondary electrons is disclosed. A first auxiliary electrode impressed with a negative potential of several to several tens of volts is arranged in the vicinity of a radiation hole of the primary electron beam under an objective lens, and a second auxiliary electrode impressed with a positive voltage is arranged on the side of the first auxiliary electrode nearer to the secondary electron detector thereby to correct and control the trajectory of the secondary electrons. Further, a third auxiliary electrode for assisting in catching the secondary electrons generated from the specimen is arranged on the front surface of the secondary electron detector.

    摘要翻译： 公开了一种扫描电子显微镜，其中从样品产生的二次电子被二次电子检测器有效地捕获，通过校正和控制二次电子的轨迹。 在物镜下方的一次电子束的放射孔附近配置有数十〜数十伏的负电位的第一辅助电极，并且在侧面配置施加正电压的第二辅助电极 的第二辅助电极，从而校正和控制二次电子的轨迹。 此外，在二次电子检测器的前表面上布置有用于辅助捕获从试样产生的二次电子的第三辅助电极。

    Charged particle radiation device
    6.
    发明授权
    Charged particle radiation device 有权
    带电粒子辐射装置

    公开(公告)号：US08294097B2

    公开(公告)日：2012-10-23

    申请号：US13147980

    申请日：2010-01-20

    申请人： Junichi Katane ,  Sukehiro Ito

    发明人： Junichi Katane ,  Sukehiro Ito

    IPC分类号： H01J37/28 ,  H01J37/26 ,  G01N23/225

    CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2605

    摘要： The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.

    摘要翻译： 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。

    Charged particle beam apparatus
    7.
    发明授权
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号：US08143573B2

    公开(公告)日：2012-03-27

    申请号：US12490775

    申请日：2009-06-24

    申请人： Sukehiro Ito ,  Junichi Katane ,  Shigeru Kawamata ,  Shinichi Tomita

    发明人： Sukehiro Ito ,  Junichi Katane ,  Shigeru Kawamata ,  Shinichi Tomita

    IPC分类号： G02F1/1335 ,  G01K1/08

    CPC分类号： H01J37/1478 ,  H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2611

    摘要： A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.

    摘要翻译： 照射在试样上的带电粒子束被设定为具有对应于副视角的左右倾斜角。 提供了一种控制单元，其在垂直于每个扫描线上的光束上交替地向左侧倾斜和对准视角的右侧倾斜扫描样本上的光束。 以这种方式，获取图像。 通过将像差消除装置与根据近视角的光束的控制组合来实时显示分辨率的劣化被抑制的三维图像。 像差消除装置使用具有多级透镜的光学系统，通过利用透镜的作用将光束偏转回光轴来提供像差的整体消除。

    Scanning electron microscope
    8.
    发明申请
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US20080073534A1

    公开(公告)日：2008-03-27

    申请号：US11717093

    申请日：2007-03-13

    申请人： Junichi Katane ,  Sukehiro Ito

    发明人： Junichi Katane ,  Sukehiro Ito

    IPC分类号： G21K7/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2444 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2608

    摘要： A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.

    摘要翻译： 公开了一种能够确保高离子检测效率的扫描电子显微镜，尽管工作距离短，适用于高分辨率。 用于检测离子的离子检测器布置成比用于将样品室保持在预定真空中的第一限压孔更靠近电子源。 这种结构一方面可以实现半透镜物镜的高分辨率，另一方面可以检测由二次电子和气体分子之间的碰撞产生的离子。

    Charged particle beam apparatus and method for charged particle beam adjustment
    9.
    发明申请
    Charged particle beam apparatus and method for charged particle beam adjustment 有权
    带电粒子束装置和带电粒子束调整方法

    公开(公告)号：US20070284542A1

    公开(公告)日：2007-12-13

    申请号：US11715506

    申请日：2007-03-08

    申请人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane ,  Toshihide Agemura ,  Yuusuke Narita ,  Takeharu Shichiji ,  Shinichi Tomita ,  Sukehiro Ito ,  Junichi Katane

    发明人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane ,  Toshihide Agemura ,  Yuusuke Narita ,  Takeharu Shichiji ,  Shinichi Tomita ,  Sukehiro Ito ,  Junichi Katane

    IPC分类号： G01N21/00

    CPC分类号： G01N23/22 ,  H01J37/1471 ,  H01J37/28 ,  H01J2237/1501

    摘要： A charged particle beam apparatus facilitating adjusting the beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a processing step (1) for measuring the sensitivity of the aligner and a processing step (2) for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus has means for determining the aligner set values, using the aligner sensitivity measured in the processing step (1) and the amount of deviation detected in the processing step (2), such that the primary charged particle beam passes through the center of the objective aperture and controlling the aligner using the aligner set values.

    摘要翻译： 在光学条件被修改的情况下或者由于装置的状态变化使带电粒子束的束中心轴移动的情况下，有利于调整带电粒子束的束中心轴的带电粒子束装置。 当用偏转器（对准器）调整初级带电粒子束的束中心轴时，用于测量对准器的灵敏度的处理步骤（1）和用于检测初级带电粒子的中心之间的偏差的处理步骤（2） 提供带电粒子束和物镜孔的中心。 带电粒子束装置具有使用在处理步骤（1）中测量的对准器灵敏度和在处理步骤（2）中检测到的偏差量来确定对准器设定值的装置，使得初级带电粒子束通过 物镜光圈中心，并使用对准器设定值控制对准器。

    CHARGED PARTICLE RADIATION DEVICE
    10.
    发明申请
    CHARGED PARTICLE RADIATION DEVICE 有权
    充电颗粒辐射装置

    公开(公告)号：US20110291010A1

    公开(公告)日：2011-12-01

    申请号：US13147980

    申请日：2010-01-20

    申请人： Junichi Katane ,  Sukehiro Ito

    发明人： Junichi Katane ,  Sukehiro Ito

    IPC分类号： H01J37/18 ,  H01J37/28

    CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2605

    摘要： The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.

    摘要翻译： 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。