发明申请
- 专利标题: Transistor and semiconductor device
- 专利标题(中): 晶体管和半导体器件
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申请号: US10765901申请日: 2004-01-29
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公开(公告)号: US20050127380A1公开(公告)日: 2005-06-16
- 发明人: Masashi Kawasaki , Hideo Ohno
- 申请人: Masashi Kawasaki , Hideo Ohno
- 优先权: JPJP10-326889 19981117
- 主分类号: G11C11/401
- IPC分类号: G11C11/401 ; H01L21/331 ; H01L27/15 ; H01L29/22 ; H01L29/51 ; H01L29/73 ; H01L29/78 ; H01L29/786 ; H01L33/28 ; H01S5/026 ; H01L33/00
摘要:
A transistor is provided, which is entirely and partially transparent by the use of a transparent channel layer made of zinc oxide or the like. A channel layer 11 formed of a transparent semiconductor such as zinc oxide ZnO. A transparent electrode is used for all of a source 12, a drain 13 and a gate 14, or a part of them. As the transparent electrode, a transparent conductive material such as conductive ZnO doped with, for example, group III elements is used. As a gate insulating layer 15, a transparent insulative material such as insulative ZnO doped with elements capable of taking a valence of one as a valence number or group V elements is used. If a substrate 16 must be transparent, for example, glass, sapphire, plastic or the like can be used as a transparent material.
公开/授权文献
- US07064346B2 Transistor and semiconductor device 公开/授权日:2006-06-20
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