发明申请
- 专利标题: Electrical feedback detection system for multi-point probes
- 专利标题(中): 多点探针电反馈检测系统
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申请号: US10500768申请日: 2003-01-07
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公开(公告)号: US20050127929A1公开(公告)日: 2005-06-16
- 发明人: Christian Petersen , Peter Nielsen
- 申请人: Christian Petersen , Peter Nielsen
- 优先权: DKPA200200020 20020107
- 国际申请: PCT/DK03/00006 WO 20030107
- 主分类号: G01R1/073
- IPC分类号: G01R1/073 ; G01N27/04 ; G01Q60/30 ; G01R1/067 ; G01R31/02
摘要:
An electrical feedback detection system for detecting electrical contact between a multi-point probe and an electrically conducting material test sample surface. The electrical feedback detection system comprises an electrical detector unit connected to a multitude of electrodes in the multi-point probe, and optionally directly to the test sample surface. The detector unit provides an electrical signal to a multi-point testing apparatus, which can be used to determine if the multi-point probe is in electrical contact with the test sample surface. The detector unit comprises an electrical generator means for generating an electrical signal that is driven through a first multitude of electrodes of the multi-point probe, and a second multitude of switched impedance detection elements. The electrical potential across the impedance detection elements determines the electrical contact to the test sample surface.
公开/授权文献
- US07135876B2 Electrical feedback detection system for multi-point probes 公开/授权日:2006-11-14
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