发明申请
US20050130060A1 Positive photosensitive composition 有权
正光敏组合物

Positive photosensitive composition
摘要:
A positive photosensitive composition comprises a compound capable of generating a specified sulfonic acid upon irradiation with one of an actinic ray and radiation and (B) a resin capable of decomposing under the action of an acid to increase the solubility in an alkali developer.
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