发明申请
US20050132803A1 Low cost integrated MEMS hybrid 审中-公开
低成本集成MEMS混合

Low cost integrated MEMS hybrid
摘要:
The present invention is directed to MEMS-based accelerometer comprising semiconductor substrate and a generally hollow shell having an open end and a closed end, wherein the open end of the shell is generally bonded to the top surface of the substrate. The shell comprises a plurality of capacitor plates electrically connected to a respective plurality of capacitor electrodes associated with the shell, wherein the shell further comprises a common electrode, and wherein the plurality of capacitor electrodes and the common electrode are electrically connected to the substrate via the bonding of the open end of the shell to the substrate. The accelerometer further comprises a sensing element comprising an electrically conductive torsion bar coupled to the shell, defining an axis of rotation. A proof mass and a plurality of electrically conductive paddles are coupled to the torsion bar, wherein a movement of the proof mass is operable to cause a rotation of the paddles about the axis of rotation, therein changing a capacitance between the plurality of paddles and the respective plurality of capacitor plates.
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