发明申请
- 专利标题: Manufacturing method of a semiconductor device
- 专利标题(中): 半导体器件的制造方法
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申请号: US11012156申请日: 2004-12-16
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公开(公告)号: US20050133895A1公开(公告)日: 2005-06-23
- 发明人: Kenji Ujiie , Bunji Kuratomi
- 申请人: Kenji Ujiie , Bunji Kuratomi
- 优先权: JP2003-424923 20031222
- 主分类号: H01L23/12
- IPC分类号: H01L23/12 ; H01L21/44 ; H01L21/48 ; H01L21/56 ; H01L23/02 ; H01L23/28 ; H01L23/31 ; H01L23/495 ; H01L25/04
摘要:
The yield of a sealing process for a semiconductor device which adopts a flip-chip mounting method is to be improved. In a molding process wherein plural semiconductor chip ICs mounted on a parts mounting surface of a substrate matrix through bump electrodes are to be sealed all together with a sealing resin in a reduced state of the internal pressure of a cavity of a molding apparatus, a clamping pressure at the time of clamping the substrate matrix by both a lower die and an upper die of a molding die is set at a relatively low pressure in an initial stage of injection of the sealing resin and is changed to a relatively high pressure when the sealing resin has covered the semiconductor chip ICs located in a final stage in the resin injecting direction.
公开/授权文献
- US07371606B2 Manufacturing method of a semiconductor device 公开/授权日:2008-05-13
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