发明申请
- 专利标题: PROJECTION LENS AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- 专利标题(中): 投影镜头和微观投影曝光装置
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申请号: US10906737申请日: 2005-03-03
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公开(公告)号: US20050134967A1公开(公告)日: 2005-06-23
- 发明人: Martin Brunotte , Jurgen Hartmaier , Hubert Holderer , Winfried Kaiser , Alexander Kohl , Jens Kugler , Manfred Maul , Christian Wagner
- 申请人: Martin Brunotte , Jurgen Hartmaier , Hubert Holderer , Winfried Kaiser , Alexander Kohl , Jens Kugler , Manfred Maul , Christian Wagner
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE10123725.1 20010515
- 主分类号: G02B7/02
- IPC分类号: G02B7/02 ; G02B1/02 ; G02B5/30 ; G03F7/20 ; H01L21/027 ; G02B3/00 ; G02B9/00
摘要:
A projection exposure apparatus for microlithography has a light source, an illumination system, a mask-positioning system and a projection lens. The latter has a system aperture plane and an image plane and contains at least one lens that is made of a material which has a birefringence dependent on the transmission angle. The exposure apparatus further has an optical element, which has a position-dependent polarization-rotating effect or a position-dependent birefringence. This element, which is provided close to a pupil plane of the projection exposure apparatus, compensates at least partially for the birefringent effects produced in the image plane by the at least one lens.
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |