发明申请
- 专利标题: Dual-trench isolated crosspoint memory array
- 专利标题(中): 双沟隔离交叉点存储器阵列
-
申请号: US11039536申请日: 2005-01-19
-
公开(公告)号: US20050136602A1公开(公告)日: 2005-06-23
- 发明人: Sheng Hsu , Wei Pan , Wei-Wei Zhuang
- 申请人: Sheng Hsu , Wei Pan , Wei-Wei Zhuang
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 主分类号: H01L21/76
- IPC分类号: H01L21/76 ; G11C13/00 ; H01L21/3205 ; H01L21/8246 ; H01L23/52 ; H01L27/10 ; H01L27/105 ; H01L27/24 ; H01L43/08 ; H01L29/02 ; H01L21/336 ; H01L21/4763 ; H01L47/00
摘要:
A memory array dual-trench isolation structure and a method for forming the same have been provided. The method comprises: forming a p-doped silicon (p-Si) substrate; forming an n-doped (n+) Si layer overlying the p-Si substrate; prior to forming the n+ Si bit lines, forming a p+ Si layer overlying the n+ Si layer; forming a layer of silicon nitride overlying the p+ layer; forming a top oxide layer overlying the silicon nitride layer; performing a first selective etch of the top oxide layer, the silicon nitride layer, the p+ Si layer, and a portion of the n+ Si layer, to form n+ Si bit lines and bit line trenches between the bit lines; forming an array of metal bottom electrodes overlying a plurality of n-doped silicon (n+ Si) bit lines, with intervening p-doped (p+) Si areas; forming a plurality of word line oxide isolation structures orthogonal to and overlying the n+ Si bit lines, adjacent to the bottom electrodes, and separating the p+ Si areas; forming a plurality of top electrode word lines, orthogonal to the n+ Si bit lines, with an interposing memory resistor material overlying the bottom electrodes; and, forming oxide-filled word line trenches adjacent the word lines.
公开/授权文献
- US07042066B2 Dual-trench isolated crosspoint memory array 公开/授权日:2006-05-09
信息查询
IPC分类: