发明申请
- 专利标题: Magnetic head of magnetoresistance effect type and process for production thereof
- 专利标题(中): 磁阻效应磁头及其制造方法
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申请号: US11009773申请日: 2004-12-10
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公开(公告)号: US20050141143A1公开(公告)日: 2005-06-30
- 发明人: Hiroyuki Ono , Hiroaki Suzuki , Toshio Sunaga , Hisatada Miyatake , Hideo Asano
- 申请人: Hiroyuki Ono , Hiroaki Suzuki , Toshio Sunaga , Hisatada Miyatake , Hideo Asano
- 申请人地址: NL Amsterdam
- 专利权人: Hitachi Global Storage Technologies Netherlands, B.V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands, B.V.
- 当前专利权人地址: NL Amsterdam
- 优先权: JP2003-432646 20031226
- 主分类号: G11B5/39
- IPC分类号: G11B5/39 ; G11B5/127 ; G11B5/33 ; G11B5/40 ; H01L43/08
摘要:
In the case of magnetic head of magnetoresistance effect type whose breakdown voltage is as low as 0.3 V, it is impractical to ignore even a very small amount of static electricity that occurs during fabrication or use. In one embodiment, the desired magnetic head is produced by forming an SiO2 layer on a silicon slider, thereby forming an SOI substrate; forming on the SOI substrate circuits to protect a TMR element from overvoltage and a read-write circuit; forming field effect transistors from an Si semiconductor layer (formed by reduction of the SiO2 layer or epitaxial growth on the SiO2 layer); forming three electrodes (source, gate, drain) on the Si semiconductor layer; forming a Schottky diode by Schottky contact (metal) with the Si semiconductor layer; forming overvoltage protective circuits of aluminum wiring on the SOI substrate; and forming a TMR element.
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