发明申请
- 专利标题: Method of fabricating bottom gate type organic thin film transistor
- 专利标题(中): 底栅型有机薄膜晶体管的制造方法
-
申请号: US11009831申请日: 2004-12-10
-
公开(公告)号: US20050142496A1公开(公告)日: 2005-06-30
- 发明人: Seung Kang , Seongdeok Ahn , Chul Kim , Meyoung Joung , Kyung Suh
- 申请人: Seung Kang , Seongdeok Ahn , Chul Kim , Meyoung Joung , Kyung Suh
- 优先权: KR2003-96220 20031224
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; G03F7/00 ; H01L51/00 ; H01L51/05
摘要:
A method of fabricating a bottom gate type organic thin film transistor is provided. The method includes the acts of: forming a gate conductive layer pattern on a substrate; forming a gate insulating layer on an exposed portion of the surface of the substrate and the gate conductive layer pattern; forming source/drain electrodes on the gate insulating layer to expose a portion of the surface of the gate insulating layer above on the gate conductive layer pattern; forming an organic semiconductor thin film on the exposed portion of the gate insulating layer; forming on the organic semiconductor thin film a passivation layer pattern exposing a portion of the surface of the organic semiconductor thin film; and forming an organic semiconductor thin film pattern by etching the exposed surface of the organic semiconductor thin film using the passivation layer pattern as an etch mask.
公开/授权文献
信息查询
IPC分类: