发明申请
- 专利标题: Method for fabricating liquid crystal display device
- 专利标题(中): 制造液晶显示装置的方法
-
申请号: US11017853申请日: 2004-12-22
-
公开(公告)号: US20050142704A1公开(公告)日: 2005-06-30
- 发明人: Jae Oh , Kyoung Lee , Sung Hong
- 申请人: Jae Oh , Kyoung Lee , Sung Hong
- 优先权: KR2003-99327 20031229
- 主分类号: G02F1/136
- IPC分类号: G02F1/136 ; G02F1/1362 ; H01L21/77 ; H01L21/84 ; H01L27/12 ; H01L21/00 ; H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/119
摘要:
Disclosed is a method for fabricating a thin film transistor for a liquid crystal display device using four masks and without using a diffraction mask. The method of the present invention uses a first mask when forming a gate electrode, a second mask when forming an active pattern, a third mask when forming a plurality of contact holes at an upper portion of a channel layer, and a fourth mask when forming a pixel electrode and source and drain electrodes, so that the resulting liquid crystal display device may be completed by four masks without using a diffraction exposure method. Instead of using a diffraction mask, the present invention uses different etching rates between an insulating layer and an electrode layer, which is used for source and drain electrodes, in fabricating a thin film transistor.
公开/授权文献
- US07125756B2 Method for fabricating liquid crystal display device 公开/授权日:2006-10-24
信息查询
IPC分类: