发明申请
- 专利标题: Gallium nitride material structures including isolation regions and methods
- 专利标题(中): 氮化镓材料结构包括隔离区和方法
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申请号: US10879695申请日: 2004-06-28
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公开(公告)号: US20050145851A1公开(公告)日: 2005-07-07
- 发明人: Jerry Johnson , Ricardo Borges , Jeffrey Brown , James Cook , Allen Hanson , Edwin Piner , Pradeep Rajagopal , John Roberts , Sameer Singhal , Robert Therrien , Andrei Vescan
- 申请人: Jerry Johnson , Ricardo Borges , Jeffrey Brown , James Cook , Allen Hanson , Edwin Piner , Pradeep Rajagopal , John Roberts , Sameer Singhal , Robert Therrien , Andrei Vescan
- 申请人地址: US NC Raleigh
- 专利权人: Nitronex Corporation
- 当前专利权人: Nitronex Corporation
- 当前专利权人地址: US NC Raleigh
- 主分类号: H01L21/285
- IPC分类号: H01L21/285 ; H01L21/329 ; H01L21/335 ; H01L29/20 ; H01L29/872 ; H01L29/15
摘要:
Gallium nitride material structures, including devices, and methods associated with the same are provided. In some embodiments, the structures include one or more isolation regions which electrically isolate adjacent devices. One aspect of the invention is the discovery that the isolation regions also can significantly reduce the leakage current of devices (e.g., transistors) made from the structures, particularly devices that also include a passivating layer formed on a surface of the gallium nitride material. Lower leakage currents can result in increased power densities and operating voltages, amongst other advantages.
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