发明申请
- 专利标题: Semiconductor device and methods of manufacturing the same
- 专利标题(中): 半导体器件及其制造方法
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申请号: US11022809申请日: 2004-12-28
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公开(公告)号: US20050151173A1公开(公告)日: 2005-07-14
- 发明人: Sang-Hun Seo , Seung-Hyun Park , Han-Sin Lee , Moo-Sung Kim , Won-Suk Yang
- 申请人: Sang-Hun Seo , Seung-Hyun Park , Han-Sin Lee , Moo-Sung Kim , Won-Suk Yang
- 申请人地址: KR Suwon-city
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-city
- 优先权: KR2002-51322 20020829
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/265 ; H01L21/336 ; H01L21/8238 ; H01L27/108 ; H01L29/76 ; H01L29/78
摘要:
A CMOS semiconductor device and a method of manufacturing the same in which the gate induced drain leakage (GIDL) effect is reduced. In the semiconductor device of this invention, high concentration source/drain regions of a PMOS transistor are formed away from the gate pattern sidewall spacers. This is accomplished by using as an implant mask a dielectric film formed on an entire surface of a semiconductor substrate, where the semiconductor substrate includes a PMOS transistor region in an n-well, a low concentration source/drain regions of a PMOS transistor formed by using a gate pattern as an implant mask, the PMOS transistor gate pattern sidewall spacers, and an NMOS transistor region in a p-well with the NMOS transistor having both a low concentration and a high concentration source/drain regions.
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