Invention Application
- Patent Title: Self-aligned trimmed pole
- Patent Title (中): 自对准修边杆
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Application No.: US11091160Application Date: 2005-03-28
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Publication No.: US20050168871A1Publication Date: 2005-08-04
- Inventor: Cherng-Chyi Han , Mao-Min Chen , Fenglin Liu
- Applicant: Cherng-Chyi Han , Mao-Min Chen , Fenglin Liu
- Assignee: HEADWAY TECHNOLOGIES, INC.
- Current Assignee: HEADWAY TECHNOLOGIES, INC.
- Main IPC: G11B5/31
- IPC: G11B5/31 ; G11B5/147

Abstract:
A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a uniform width above and below a write gap layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the alumina write-gap filling material. The present method uses NiCr, NiFeCr or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant.
Public/Granted literature
- US07359150B2 Self-aligned trimmed pole Public/Granted day:2008-04-15
Information query
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