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公开(公告)号：US20050168871A1
公开(公告)日：2005-08-04
申请号：US11091160
申请日：2005-03-28
Applicant: Cherng-Chyi Han , Mao-Min Chen , Fenglin Liu
Inventor： Cherng-Chyi Han , Mao-Min Chen , Fenglin Liu
CPC classification number: G11B5/3116 , G11B5/1278 , G11B5/23 , G11B5/3163
Abstract: A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a uniform width above and below a write gap layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the alumina write-gap filling material. The present method uses NiCr, NiFeCr or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant.
Abstract translation: 一种用于形成用于磁性写入头的修整的上极片的方法，所述极片在写间隙层上方和下方具有均匀的宽度。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本方法使用NiCr，NiFeCr或Ru作为写入间隙填充材料，其蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并且具有高度耐腐蚀性。
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公开(公告)号：US07359150B2
公开(公告)日：2008-04-15
申请号：US11091160
申请日：2005-03-28
Applicant: Cherng-Chyi Han , Mao-Min Chen , Fenglin Liu
Inventor： Cherng-Chyi Han , Mao-Min Chen , Fenglin Liu
CPC classification number: G11B5/3116 , G11B5/1278 , G11B5/23 , G11B5/3163
Abstract: A trimmed upper pole piece for a magnetic write head is presented, said pole piece having a uniform width above and below a write gap layer and said pole piece being formed on a pedestal of uniform width projecting from a planar surface of a magnetic shield layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the typical alumina write-gap filling material. The present pole piece uses NiCr, NiFeCr or Ru as write gap filling materials because they have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and allow a uniform trimming to occur.
Abstract translation: 提出了一种用于磁性写入头的修整的上极片，所述极片在写间隙层上方和下方具有均匀的宽度，并且所述极片形成在从磁屏蔽层的平坦表面突出的均匀宽度的基座上。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于典型的氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本极极片使用NiCr，NiFeCr或Ru作为写入间隙填充材料，因为它们的蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并允许发生均匀的修整。
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3.发明授权Method to make a wider trailing pole structure by self-aligned pole trim process 失效通过自对准极修剪工艺制作更宽的尾柱结构的方法公开(公告)号：US06960281B2
公开(公告)日：2005-11-01
申请号：US10394098
申请日：2003-03-21
Applicant: Cherng-Chyi Han , Mao-Min Chen , Po Kang Wang , Fenglin Liu
Inventor： Cherng-Chyi Han , Mao-Min Chen , Po Kang Wang , Fenglin Liu
CPC classification number: G11B5/3163 , G11B5/3116 , G11B5/3967 , Y10T29/49032
Abstract: A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The present method produces the necessary taper by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.
Abstract translation: 一种用于形成用于磁性写入头的修整的上极片的方法，所述极片具有在其后缘处最宽的锥形轮廓。 这样的极片能够以清晰明确的图案和相邻轨迹的最小重写来写入窄轨道。 本方法通过使用NiCr，NiFeCr，Rh或Ru作为写入间隙填充材料产生必要的锥度，其具有基本上等于形成极片的其它层的蚀刻速率的蚀刻速率，并且具有高耐腐蚀性。 结果，写入间隙不突出以掩盖用于形成锥形的离子束蚀刻的效果。
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公开(公告)号：US06887355B2
公开(公告)日：2005-05-03
申请号：US10284848
申请日：2002-10-31
Applicant: Cherng-Chyi Han , Mao-Min Chen , Fenglin Liu
Inventor： Cherng-Chyi Han , Mao-Min Chen , Fenglin Liu
CPC classification number: G11B5/3116 , G11B5/1278 , G11B5/23 , G11B5/3163
Abstract: A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a uniform width above and below a write gap layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the alumina write-gap filling material. The present method uses NiCr, NiFeCr or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant.
Abstract translation: 一种用于形成用于磁性写入头的修整的上极片的方法，所述极片在写间隙层上方和下方具有均匀的宽度。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本方法使用NiCr，NiFeCr或Ru作为写入间隙填充材料，其蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并且具有高度耐腐蚀性。
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公开(公告)号：US20060012915A1
公开(公告)日：2006-01-19
申请号：US11229160
申请日：2005-09-16
Applicant: Cherng-Chyi Han , Mao-Min Chen , Po Wang , Fenglin Liu
Inventor： Cherng-Chyi Han , Mao-Min Chen , Po Wang , Fenglin Liu
IPC: G11B5/147
CPC classification number: G11B5/3163 , G11B5/3116 , G11B5/3967 , Y10T29/49032
Abstract: A trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The necessary taper is produced by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.
Abstract translation: 用于磁写头的经修剪的上极片，所述极片具有在其后缘处最宽的锥形轮廓。 这样的极片能够以清晰明确的图案和相邻轨迹的最小重写来写入窄轨道。 通过使用NiCr，NiFeCr，Rh或Ru作为写入间隙填充材料产生必要的锥度，其具有基本上等于形成极片的其它层的蚀刻速率的蚀刻速率并且具有高耐腐蚀性。 结果，写入间隙不会突出以掩盖用于形成锥形的离子束蚀刻的效果。
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Patent Agency Ranking
公开(公告)号：US07382577B2
公开(公告)日：2008-06-03
申请号：US11229160
申请日：2005-09-16
Applicant: Cherng-Chyi Han , Mao-Min Chen , Po Kang Wang , Fenglin Liu
Inventor： Cherng-Chyi Han , Mao-Min Chen , Po Kang Wang , Fenglin Liu
CPC classification number: G11B5/3163 , G11B5/3116 , G11B5/3967 , Y10T29/49032
Abstract: A trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The necessary taper is produced by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.
Abstract translation: 用于磁写头的经修剪的上极片，所述极片具有在其后缘处最宽的锥形轮廓。 这样的极片能够以清晰明确的图案和相邻轨迹的最小重写来写入窄轨道。 通过使用NiCr，NiFeCr，Rh或Ru作为写入间隙填充材料产生必要的锥度，其具有基本上等于形成极片的其它层的蚀刻速率的蚀刻速率并且具有高耐腐蚀性。 结果，写入间隙不突出以掩盖用于形成锥形的离子束蚀刻的效果。
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公开(公告)号：US08189295B2
公开(公告)日：2012-05-29
申请号：US13135276
申请日：2011-06-30
Applicant: Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
Inventor： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
IPC: G11B5/127
CPC classification number: G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49032 , Y10T29/49052
Abstract: A perpendicular magnetic recording (PMR) head has a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form a wedge-shaped trench in which the pole tip has been formed by a self-aligned plating process. A write gap layer and an upper shield is formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.
Abstract translation: 垂直磁记录（PMR）头具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上方屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖已经通过自对准电镀工艺形成。 写入间隙层和上屏蔽形成在侧屏蔽和极上。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。
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公开(公告)号：US20110261486A1
公开(公告)日：2011-10-27
申请号：US13135276
申请日：2011-06-30
Applicant: Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
Inventor： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
IPC: G11B5/187
CPC classification number: G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49032 , Y10T29/49052
Abstract: A perpendicular magnetic recording (PMR) head has a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form a wedge-shaped trench in which the pole tip has been formed by a self-aligned plating process. A write gap layer and an upper shield is formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.
Abstract translation: 垂直磁记录（PMR）头具有由分离的一对底侧屏蔽物侧向屏蔽的极尖，并由上屏蔽从上方屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖已经通过自对准电镀工艺形成。 写入间隙层和上屏蔽形成在侧屏蔽和极上。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。
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9.发明授权Method to make a perpendicular magnetic recording head with a bottom side shield 有权制造具有底侧屏蔽的垂直磁记录头的方法公开(公告)号：US07978431B2
公开(公告)日：2011-07-12
申请号：US11809346
申请日：2007-05-31
Applicant: Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
Inventor： Cherng-Chyi Han , Min Li , Fenglin Liu , Lijie Guan
IPC: G11B5/127
CPC classification number: G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49032 , Y10T29/49052
Abstract: A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form wedge-shaped trench in which the pole tip is formed by a self-aligned plating process. The wedge shape is formed by a RIE process using specific gases applied through a masking layer formed of material that has a slower etch rate than the non-magnetic material or the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a non-magnetic layer of alumina that is formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. A write gap layer and an upper shield is then formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.
Abstract translation: 垂直磁记录（PMR）头被制造成具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上面屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖通过自对准电镀工艺形成。 楔形形状通过RIE工艺形成，其使用通过由比非磁性材料或屏蔽材料具有较慢蚀刻速率的材料形成的掩模层施加的特定气体。 形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的形成在氧化铝的非磁性层上的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果 。 然后在侧屏和极上方形成写间隙层和上屏蔽。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。
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公开(公告)号：US20080253035A1
公开(公告)日：2008-10-16
申请号：US11728910
申请日：2007-03-27
Applicant: Cherng-Chyi Han , Min Li , Fenglin Liu , Chen-Jung Chien
Inventor： Cherng-Chyi Han , Min Li , Fenglin Liu , Chen-Jung Chien
CPC classification number: G11B5/1278 , G11B5/112 , G11B5/3146 , G11B5/315 , G11B5/3163 , G11B5/3169 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T428/1193
Abstract: A process for forming the write pole of a PMR head is described. This write pole is symmetrically located relative to its side shields, This is accomplished, not through optical alignment, but by coating the pole with a uniform layer of non-magnetic material of a predetermined and precise thickness, followed by the formation of the shield layer around this.
Abstract translation: 描述了用于形成PMR头的写入极的过程。 该写入极相对于其侧屏对称地定位，这不是通过光学对准而是通过用预定和精确厚度的均匀的非磁性材料层涂覆极，然后形成屏蔽层 围绕这一点。
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