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    Self-aligned trimmed pole
    1.
    发明申请
    Self-aligned trimmed pole 失效
    自对准修边杆

    公开(公告)号：US20050168871A1

    公开(公告)日：2005-08-04

    申请号：US11091160

    申请日：2005-03-28

    申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

    发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

    IPC分类号： G11B5/31 ,  G11B5/147

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3163

    摘要： A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a uniform width above and below a write gap layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the alumina write-gap filling material. The present method uses NiCr, NiFeCr or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant.

    摘要翻译： 一种用于形成用于磁性写入头的修整的上极片的方法，所述极片在写间隙层上方和下方具有均匀的宽度。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本方法使用NiCr，NiFeCr或Ru作为写入间隙填充材料，其蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并且具有高度耐腐蚀性。

    Self-aligned trimmed pole
    2.
    发明授权
    Self-aligned trimmed pole 失效
    自对准修边杆

    公开(公告)号：US07359150B2

    公开(公告)日：2008-04-15

    申请号：US11091160

    申请日：2005-03-28

    申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

    发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

    IPC分类号： G11B5/39 ,  G11B5/147

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3163

    摘要： A trimmed upper pole piece for a magnetic write head is presented, said pole piece having a uniform width above and below a write gap layer and said pole piece being formed on a pedestal of uniform width projecting from a planar surface of a magnetic shield layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the typical alumina write-gap filling material. The present pole piece uses NiCr, NiFeCr or Ru as write gap filling materials because they have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and allow a uniform trimming to occur.

    摘要翻译： 提出了一种用于磁性写入头的修整的上极片，所述极片在写间隙层上方和下方具有均匀的宽度，并且所述极片形成在从磁屏蔽层的平坦表面突出的均匀宽度的基座上。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于典型的氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本极极片使用NiCr，NiFeCr或Ru作为写入间隙填充材料，因为它们的蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并允许发生均匀的修整。

    Method to make a wider trailing pole structure by self-aligned pole trim process
    3.
    发明授权
    Method to make a wider trailing pole structure by self-aligned pole trim process 失效
    通过自对准极修剪工艺制作更宽的尾柱结构的方法

    公开(公告)号：US06960281B2

    公开(公告)日：2005-11-01

    申请号：US10394098

    申请日：2003-03-21

    申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Kang Wang ,  Fenglin Liu

    发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Kang Wang ,  Fenglin Liu

    IPC分类号： G11B5/31 ,  G11B5/39 ,  C23C14/34

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  G11B5/3967 ,  Y10T29/49032

    摘要： A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The present method produces the necessary taper by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.

    摘要翻译： 一种用于形成用于磁性写入头的修整的上极片的方法，所述极片具有在其后缘处最宽的锥形轮廓。 这样的极片能够以清晰明确的图案和相邻轨迹的最小重写来写入窄轨道。 本方法通过使用NiCr，NiFeCr，Rh或Ru作为写入间隙填充材料产生必要的锥度，其具有基本上等于形成极片的其它层的蚀刻速率的蚀刻速率，并且具有高耐腐蚀性。 结果，写入间隙不突出以掩盖用于形成锥形的离子束蚀刻的效果。

    Self-aligned pole trim process
    4.
    发明授权
    Self-aligned pole trim process 失效
    自对准极修整过程

    公开(公告)号：US06887355B2

    公开(公告)日：2005-05-03

    申请号：US10284848

    申请日：2002-10-31

    申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

    发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

    IPC分类号： G11B5/31 ,  C23C14/34 ,  B05D1/40 ,  B05D3/00

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3163

    摘要： A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a uniform width above and below a write gap layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the alumina write-gap filling material. The present method uses NiCr, NiFeCr or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant.

    摘要翻译： 一种用于形成用于磁性写入头的修整的上极片的方法，所述极片在写间隙层上方和下方具有均匀的宽度。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本方法使用NiCr，NiFeCr或Ru作为写入间隙填充材料，其蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并且具有高度耐腐蚀性。

    Magnetic write head having a wider trailing edge pole structure
    5.
    发明授权
    Magnetic write head having a wider trailing edge pole structure 失效
    具有较宽后缘极结构的磁写头

    公开(公告)号：US07382577B2

    公开(公告)日：2008-06-03

    申请号：US11229160

    申请日：2005-09-16

    申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Kang Wang ,  Fenglin Liu

    发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Kang Wang ,  Fenglin Liu

    IPC分类号： G11B5/39 ,  G11B5/187

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  G11B5/3967 ,  Y10T29/49032

    摘要： A trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The necessary taper is produced by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.

    摘要翻译： 用于磁写头的经修剪的上极片，所述极片具有在其后缘处最宽的锥形轮廓。 这样的极片能够以清晰明确的图案和相邻轨迹的最小重写来写入窄轨道。 通过使用NiCr，NiFeCr，Rh或Ru作为写入间隙填充材料产生必要的锥度，其具有基本上等于形成极片的其它层的蚀刻速率的蚀刻速率并且具有高耐腐蚀性。 结果，写入间隙不突出以掩盖用于形成锥形的离子束蚀刻的效果。

    Magnetic write head having a wider trailing edge pole structure
    6.
    发明申请
    Magnetic write head having a wider trailing edge pole structure 失效
    具有较宽后缘极结构的磁写头

    公开(公告)号：US20060012915A1

    公开(公告)日：2006-01-19

    申请号：US11229160

    申请日：2005-09-16

    申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Wang ,  Fenglin Liu

    发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Wang ,  Fenglin Liu

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  G11B5/3967 ,  Y10T29/49032

    摘要： A trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The necessary taper is produced by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.

    摘要翻译： 用于磁写头的经修剪的上极片，所述极片具有在其后缘处最宽的锥形轮廓。 这样的极片能够以清晰明确的图案和相邻轨迹的最小重写来写入窄轨道。 通过使用NiCr，NiFeCr，Rh或Ru作为写入间隙填充材料产生必要的锥度，其具有基本上等于形成极片的其它层的蚀刻速率的蚀刻速率并且具有高耐腐蚀性。 结果，写入间隙不会突出以掩盖用于形成锥形的离子束蚀刻的效果。

    Perpendicular magnetic recording head with a bottom side shield
    7.
    发明授权
    Perpendicular magnetic recording head with a bottom side shield 有权
    垂直磁记录头带底侧屏蔽

    公开(公告)号：US08189295B2

    公开(公告)日：2012-05-29

    申请号：US13135276

    申请日：2011-06-30

    申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49052

    摘要： A perpendicular magnetic recording (PMR) head has a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form a wedge-shaped trench in which the pole tip has been formed by a self-aligned plating process. A write gap layer and an upper shield is formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.

    摘要翻译： 垂直磁记录（PMR）头具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上方屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖已经通过自对准电镀工艺形成。 写入间隙层和上屏蔽形成在侧屏蔽和极上。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

    Perpendicular magnetic recording head with a bottom side shield
    8.
    发明申请
    Perpendicular magnetic recording head with a bottom side shield 有权
    垂直磁记录头带底侧屏蔽

    公开(公告)号：US20110261486A1

    公开(公告)日：2011-10-27

    申请号：US13135276

    申请日：2011-06-30

    申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    IPC分类号： G11B5/187

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49052

    摘要： A perpendicular magnetic recording (PMR) head has a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form a wedge-shaped trench in which the pole tip has been formed by a self-aligned plating process. A write gap layer and an upper shield is formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.

    摘要翻译： 垂直磁记录（PMR）头具有由分离的一对底侧屏蔽物侧向屏蔽的极尖，并由上屏蔽从上方屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖已经通过自对准电镀工艺形成。 写入间隙层和上屏蔽形成在侧屏蔽和极上。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

    Method to make a perpendicular magnetic recording head with a bottom side shield
    9.
    发明授权
    Method to make a perpendicular magnetic recording head with a bottom side shield 有权
    制造具有底侧屏蔽的垂直磁记录头的方法

    公开(公告)号：US07978431B2

    公开(公告)日：2011-07-12

    申请号：US11809346

    申请日：2007-05-31

    申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49052

    摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form wedge-shaped trench in which the pole tip is formed by a self-aligned plating process. The wedge shape is formed by a RIE process using specific gases applied through a masking layer formed of material that has a slower etch rate than the non-magnetic material or the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a non-magnetic layer of alumina that is formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. A write gap layer and an upper shield is then formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.

    摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上面屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖通过自对准电镀工艺形成。 楔形形状通过RIE工艺形成，其使用通过由比非磁性材料或屏蔽材料具有较慢蚀刻速率的材料形成的掩模层施加的特定气体。 形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的形成在氧化铝的非磁性层上的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果 。 然后在侧屏和极上方形成写间隙层和上屏蔽。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。